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<article xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:ali="http://www.niso.org/schemas/ali/1.0/" article-type="review-article" dtd-version="1.2" xml:lang="en"><front><journal-meta><journal-id journal-id-type="publisher-id">Russian Microelectronics</journal-id><journal-title-group><journal-title xml:lang="en">Russian Microelectronics</journal-title><trans-title-group xml:lang="ru"><trans-title>Микроэлектроника</trans-title></trans-title-group></journal-title-group><issn publication-format="print">0544-1269</issn><issn publication-format="electronic">3034-5480</issn><publisher><publisher-name xml:lang="en">The Russian Academy of Sciences</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="publisher-id">699164</article-id><article-id pub-id-type="doi">10.7868/S3034548025060048</article-id><article-categories><subj-group subj-group-type="toc-heading" xml:lang="en"><subject>MODELING</subject></subj-group><subj-group subj-group-type="toc-heading" xml:lang="ru"><subject>МОДЕЛИРОВАНИЕ</subject></subj-group><subj-group subj-group-type="article-type"><subject>Review Article</subject></subj-group></article-categories><title-group><article-title xml:lang="en">FLUOROPOLYMER FOR MICROELECTRONICS PRODUCTION (REVIEW)</article-title><trans-title-group xml:lang="ru"><trans-title>ОТЕЧЕСТВЕННЫЕ ФТОРПОЛИМЕРНЫЕ ИЗДЕЛИЯ ДЛЯ ПРОИЗВОДСТВА МИКРОЭЛЕКТРОНИКИ (ОБЗОР)</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author"><name-alternatives><name xml:lang="en"><surname>Bolbasov</surname><given-names>E. N.</given-names></name><name xml:lang="ru"><surname>Больбасов</surname><given-names>Е. Н.</given-names></name></name-alternatives><email>floorplast@tpu.ru</email><xref ref-type="aff" rid="aff1"/><xref ref-type="aff" rid="aff2"/></contrib><contrib contrib-type="author"><name-alternatives><name xml:lang="en"><surname>Buznik</surname><given-names>V. M.</given-names></name><name xml:lang="ru"><surname>Бузник</surname><given-names>В. М.</given-names></name></name-alternatives><email>buznikv@list.ru</email><xref ref-type="aff" rid="aff3"/><xref ref-type="aff" rid="aff4"/></contrib><contrib contrib-type="author"><name-alternatives><name xml:lang="en"><surname>Varlamov</surname><given-names>D. A.</given-names></name><name xml:lang="ru"><surname>Варламов</surname><given-names>Д. А.</given-names></name></name-alternatives><email>email@example.com</email><xref ref-type="aff" rid="aff5"/></contrib><contrib contrib-type="author"><name-alternatives><name xml:lang="en"><surname>Vorobiev</surname><given-names>A. O.</given-names></name><name xml:lang="ru"><surname>Воробьев</surname><given-names>А. О.</given-names></name></name-alternatives><email>email@example.com</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name-alternatives><name xml:lang="en"><surname>Dubinenko</surname><given-names>G. E.</given-names></name><name xml:lang="ru"><surname>Дубиненко</surname><given-names>Г. Е.</given-names></name></name-alternatives><email>email@example.com</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name-alternatives><name xml:lang="en"><surname>Eremchuk</surname><given-names>A. I.</given-names></name><name xml:lang="ru"><surname>Еремчук</surname><given-names>А. И.</given-names></name></name-alternatives><email>email@example.com</email><xref ref-type="aff" rid="aff5"/></contrib><contrib contrib-type="author"><name-alternatives><name xml:lang="en"><surname>Trusova</surname><given-names>M. E.</given-names></name><name xml:lang="ru"><surname>Трусова</surname><given-names>М. Е.</given-names></name></name-alternatives><email>email@example.com</email><xref ref-type="aff" rid="aff1"/></contrib></contrib-group><aff-alternatives id="aff1"><aff><institution xml:lang="en">Tomsk Polytechnic University</institution></aff><aff><institution xml:lang="ru">Национальный исследовательский Томский Политехнический Университет</institution></aff></aff-alternatives><aff-alternatives id="aff2"><aff><institution xml:lang="en">V.E. Zuev Institute of Atmospheric Optics RAS</institution></aff><aff><institution xml:lang="ru">Институт оптики атмосферы им. академика В.Е. Зуева СО РАН</institution></aff></aff-alternatives><aff-alternatives id="aff3"><aff><institution xml:lang="en">Tomsk State University</institution></aff><aff><institution xml:lang="ru">Национальный исследовательский Томский Государственный Университет</institution></aff></aff-alternatives><aff-alternatives id="aff4"><aff><institution xml:lang="en">Kurnakov Institute of General and Inorganic Chemistry RAS</institution></aff><aff><institution xml:lang="ru">Институт общей и неорганической химии им. Н.С. Курнакова РАН</institution></aff></aff-alternatives><aff-alternatives id="aff5"><aff><institution xml:lang="en">Molecular Electronics Research Institute</institution></aff><aff><institution xml:lang="ru">АО НИИ молекулярной электроники</institution></aff></aff-alternatives><pub-date date-type="pub" iso-8601-date="2025-12-15" publication-format="electronic"><day>15</day><month>12</month><year>2025</year></pub-date><volume>54</volume><issue>6</issue><issue-title xml:lang="en">VOL 54, NO6 (2025)</issue-title><issue-title xml:lang="ru">ТОМ 54, №6 (2025)</issue-title><fpage>487</fpage><lpage>515</lpage><history><date date-type="received" iso-8601-date="2025-12-23"><day>23</day><month>12</month><year>2025</year></date></history><permissions><copyright-statement xml:lang="en">Copyright ©; 2025, Russian Academy of Sciences</copyright-statement><copyright-statement xml:lang="ru">Copyright ©; 2025, Российская академия наук</copyright-statement><copyright-year>2025</copyright-year><copyright-holder xml:lang="en">Russian Academy of Sciences</copyright-holder><copyright-holder xml:lang="ru">Российская академия наук</copyright-holder><ali:free_to_read xmlns:ali="http://www.niso.org/schemas/ali/1.0/" start_date="2026-12-22"/></permissions><self-uri xlink:href="https://journals.eco-vector.com/0544-1269/article/view/699164">https://journals.eco-vector.com/0544-1269/article/view/699164</self-uri><abstract xml:lang="en"><p>A defining characteristic of microelectronic manufacturing is its exceptionally high standards for purity. These requirements apply to raw materials, final products, technological processes, equipment, and facilities. Such conditions are often achieved using aggressive reagents, necessitating equipment and tooling made from chemically resistant materials. Fluoropolymers (FPs) are a key class of materials that meet this need, with products made from them being integral to numerous microelectronic processes. For a long time, the necessary fluoropolymer products were imported. However, current sanctions have created an urgent need to establish their domestic production within the Russian Federation. Consequently, a thorough analysis of Russia’s fluoropolymer research and manufacturing capabilities is essential to address this challenge. The success of this endeavor will depend significantly on effective collaboration and mutual understanding between specialists in microelectronics and fluoropolymer materials – a central focus of this review. Particular attention is paid to products used for filtering aggressive reagents, purifying water and air, sampling and storing specimens, and conducting reactions with high-purity chemicals.</p></abstract><trans-abstract xml:lang="ru"><p>Особенностью микроэлектронного производства являются высокие требования к: чистоте сырья и конечных продуктов, технологическим процессам, оборудованию и помещениям. Зачастую это достигается применением агрессивных реагентов, что требует оборудования и технологической оснастки из химически стойких материалов. Таковыми являются фторполимеры (ФП), изделия из которых используются в технологических процессах микроэлектронного производства. Длительное время требуемые ФП-изделия поставлялись из-за рубежа, но сейчас они под санкциями и возникла настоятельная потребность организации их производства в РФ. Естественно, необходим анализ отечественной фторполимерной науки и производства ФП-изделий для устранения возникших проблем. Успех мероприятия во многом зависит от кооперации, взаимопонимания специалистов по микроэлектронике и фторполимерным материалам, на которых и ориентирован обзор. Особое внимание уделено изделиям для фильтрации агрессивных реагентов, очистки воды и воздуха, отбора и хранения проб, проведения реакций с особо чистыми химическими веществами.</p></trans-abstract><kwd-group xml:lang="en"><kwd>fluoropolymers</kwd><kwd>microelectronics</kwd><kwd>electrospinning</kwd><kwd>additive technologies</kwd><kwd>chemical resistance</kwd></kwd-group><kwd-group xml:lang="ru"><kwd>фторполимеры</kwd><kwd>микроэлектроника</kwd><kwd>электроформование</kwd><kwd>аддитивные технологии</kwd><kwd>химическая стойкость</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">Работа выполнена при поддержке Министерства науки и высшего образования Российской Федерации, проект «Наука» FSWW-2023-0007.</funding-statement></funding-group></article-meta></front><body></body><back><ref-list><ref id="B1"><label>1.</label><mixed-citation>Maier G. Polymers for microelectronics // Materials Today. 2001. V. 4. P. 22–33. https://doi.org/10.1016/S1369-7021(01)80253-4</mixed-citation></ref><ref id="B2"><label>2.</label><mixed-citation>Maier G. Low dielectric constant polymers for microelectronics // Prog Polym Sci. 2001. V. 26. P. 3–65.. https://doi.org/10.1016/S0079-6700(00)00043-5</mixed-citation></ref><ref id="B3"><label>3.</label><mixed-citation>Maier G., Banerjee S., Haußmann J., Sezi R. High-Temperature Polymers for Advanced Microelectronics // High Performance Polymers. 2001. V. 13. No 2. https://doi.org/10.1088/0954-0083/13/2/310</mixed-citation></ref><ref id="B4"><label>4.</label><mixed-citation>Loginov B.A., Villemson A.L., Buznik V.M. Rossiiskie ftorpolimery: istoriia, tekhnologii, perspektivy [Russian fluoropolymers: history, technology, prospects. 2013. https://www.studmed.ru/loginov-b-a-villemson-a-l-buznik-v-m-rossiyskie-ftorpolimery-istoriya-tehnologii-perspektivy_8923a195a0d.html (accessed July 4, 2023).</mixed-citation></ref><ref id="B5"><label>5.</label><mixed-citation>Buknik V.M., Khokhlov A.R. Ftorpolimernye materialy. Sovremennoe sostoyanie i perspektivy [Fluoropolymer materials. Current state and prospects] // Zhurnal Rossiiskogo Khimicheskogo Obshchestva im. D. I. Mendeleeva [Journal of the Russian Chemical Society named after D. I. Mendeleev]. 2008. V. 52. No 5. P. 5–6.</mixed-citation></ref><ref id="B6"><label>6.</label><mixed-citation>Buznik V.M. Ftorpolimernye materialy [Fluoropolymer materials] // Izd-vo NTL. 2017.</mixed-citation></ref><ref id="B7"><label>7.</label><mixed-citation>Panshin Yu.A., Malkevich S.G., Dunaevskaya Ts.S. Ftoroplasty [Fluoroplastics] // Khimiya. 1978.</mixed-citation></ref><ref id="B8"><label>8.</label><mixed-citation>Nudel’man N. Ftorkachuki: osnovy, pererabotka, primenenie [Fluoroe lastomers: fundamentals, processing, application] // OOO “PIF RIAS”. 2007.</mixed-citation></ref><ref id="B9"><label>9.</label><mixed-citation>K-Mac Plastics. Chemical resistance of plastic materials. (n. d.). http://k-mac-plastics.com/chemical-large.htm (accessed July 4, 2023).</mixed-citation></ref><ref id="B10"><label>10.</label><mixed-citation>UralActiv. Sverkhvysokomolekulyarnyy polietilen PE‑1000* [Ultra-high molecular weight polyethylene PE‑1000]. https://uralactiv.ru/listovoy-plastik/sverhvysokomolekulyarnyy-polietilen-svmpe/sverhvysokomolekulyarnyy-polietilen-pe‑1000 (accessed July 4, 2023).</mixed-citation></ref><ref id="B11"><label>11.</label><mixed-citation>Microspec Corporation. Polysulfone (PSU). from https://www.microspecorporation.com/materials/engineering-resins/polysulfone// (accessed July 4, 2023).</mixed-citation></ref><ref id="B12"><label>12.</label><mixed-citation>Sterling Plastics, Inc. Polysulfone (PSU). (n. d.). http://sterlingplasticsinc.com/materials/polysulfone-psu/ (accessed July 4, 2023).</mixed-citation></ref><ref id="B13"><label>13.</label><mixed-citation>Vitahim. Полисульфон ПСФ 150 [Polysulfone PSF 150]. (n. d.). https://vitahim.ru/catalog/polimernye_materialy/polisulfon/polisulfon_psf_150_1/ (accessed July 4, 2023).</mixed-citation></ref><ref id="B14"><label>14.</label><mixed-citation>Halopolymer. Традиционные фторполимеры [Traditional fluoropolymers]. (n. d.). https://halopolymer.ru/product/ftorpolimery/traditsionnye-ftorpolimery/ (accessed July 4, 2023).</mixed-citation></ref><ref id="B15"><label>15.</label><mixed-citation>Molded. Overview of materials for Polytetrafluoroethylene (PTFE) // MatWeb. (n. d.) https://www.matweb.com/search/datasheet_print.aspx?matguid=4d14eac958e5401a8fd152e1261b6843 (accessed July 4, 2023).</mixed-citation></ref><ref id="B16"><label>16.</label><mixed-citation>Chemours. Teflon™ FEP 100 Fluoropolymer Resin. // MatWeb. (n. d.). https://www.matweb.com/search/datasheet.aspx?matguid=3dbaaa8dbb114c57996acd6738a7efc1&amp;ckck=1 (accessed July 4, 2023).</mixed-citation></ref><ref id="B17"><label>17.</label><mixed-citation>Greer A.I.M., Vasiev I., Della-Rosa B., Gadegaard N. Fluorinated ethylene–propylene: a complementary alternative to PDMS for nanoimprint stamps // Nanotechnology. 2016. V. 27. P. 155301. https://doi.org/10.1088/0957-4484/27/15/155301</mixed-citation></ref><ref id="B18"><label>18.</label><mixed-citation>Halopolymer. Ф‑4МБ (FEP), (n. d.). https://halopolymer.ru/product/ftorpolimery/spetsialnye-ftorpolimery/osnovnye/f‑4mb-fep/ (accessed July 4, 2023).</mixed-citation></ref><ref id="B19"><label>19.</label><mixed-citation>AZoM. Ethylene-Chlorotrifluoroethylene – ECTFE. (n. d.). https://www.azom.com/article.aspx? ArticleID=391 (accessed July 4, 2023).</mixed-citation></ref><ref id="B20"><label>20.</label><mixed-citation>Curbell Plastics. ECTFE Halar® plastic | ECTFE material properties, chemical resistance, &amp; compatibility. (n. d.). https://www.curbellplastics.com/materials/plastics/ectfe/ (accessed July 4, 2023).</mixed-citation></ref><ref id="B21"><label>21.</label><mixed-citation>Halopolymer. Ф‑2М (PVDF). (n. d.). https://halopolymer.ru/product/ftorpolimery/spetsialnye-ftorpolimery/osnovnye/f‑2m-pvdf/ (accessed July 4, 2023).</mixed-citation></ref><ref id="B22"><label>22.</label><mixed-citation>Saxena P., Shukla P. A comprehensive review on fundamental properties and applications of polyvinylidene fluoride (PVDF) // Adv Compos Hybrid Mater. 2021. V. 4. P. 8–26. https://doi.org/10.1007/s42114-021-00217-0</mixed-citation></ref><ref id="B23"><label>23.</label><mixed-citation>Fluorotherm. PFA tubing | Properties. (n. d.). https://www.fluorotherm.com/technical-information/materials-overview/pfa-properties/ (accessed July 4, 2023).</mixed-citation></ref><ref id="B24"><label>24.</label><mixed-citation>Curbell Plastics. PFA plastic &amp; properties | Flexible fluoropolymer. (n. d.). https://www.curbellplastics.com/materials/plastics/pfa/ (accessed July 4, 2023).</mixed-citation></ref><ref id="B25"><label>25.</label><mixed-citation>Ebnesajjad S. Chemical Properties of Fluoropolymers-Polytetrafluoroethylene and Polychlorotrifluoroethylene // Fluoroplastics. 2015. P. 382–395. https://doi.org/10.1016/B978-1-4557-3199-2.00017-3</mixed-citation></ref><ref id="B26"><label>26.</label><mixed-citation>3D With Us. ABS acetone vapour smoothing – Filament review // 3D printing materials. (n. d.). https://3dwithus.com/abs-acetone-smoothing-filament-review (accessed July 10, 2023).</mixed-citation></ref><ref id="B27"><label>27.</label><mixed-citation>Vock S., Klöden B., Kirchner A., Weißgärber T., Kieback B. Powders for powder bed fusion: a review // Progress in Additive Manufacturing. 2019. V. 4. P. 383–397. https://doi.org/10.1007/s40964-019-00078-6</mixed-citation></ref><ref id="B28"><label>28.</label><mixed-citation>Schmid M., Amado A., Wegener K. Polymer powders for selective laser sintering (SLS) // AIP Conf. Proc. 2015. P. 160009. https://doi.org/10.1063/1.4918516.</mixed-citation></ref><ref id="B29"><label>29.</label><mixed-citation>Han W., Kong L., Xu M. Advances in selective laser sintering of polymers // Int. J. Extrem. Manuf. 2022. V. 4. https://doi.org/10.1088/2631-7990/ac9096</mixed-citation></ref><ref id="B30"><label>30.</label><mixed-citation>Campanelli C., Wildman R.D., Tuck C.J. Processing of High-Performance Fluoropolymers by Laser Sintering // Conf. Annual International Solid Freeform Fabrication Symposium. 2018. https://doi.org/10.26153/TSW/17153</mixed-citation></ref><ref id="B31"><label>31.</label><mixed-citation>Brito Guaricela J.L., Ahrens C.H., Oliveira Barra G.M., Merlini C. Evaluation of poly(vinylidene fluoride)/carbon black composites, manufactured by selective laser sintering // Polym. Compos. 2021. V. 42. P. 2457–2468. https://doi.org/10.1002/pc.25991.</mixed-citation></ref><ref id="B32"><label>32.</label><mixed-citation>Song S., Li Y., Wang Q., Zhang C. Facile preparation of high loading filled PVDF/BaTiO3 piezoelectric composites for selective laser sintering 3D printing // RSC Adv. 2021. V. 11. P. 37923–37931. https://doi.org/10.1039/D1RA06915B</mixed-citation></ref><ref id="B33"><label>33.</label><mixed-citation>Song S., Li Y., Wang Q., Zhang C. Boosting piezoelectric performance with a new selective laser sintering 3D printable PVDF/graphene nanocomposite // Compos. Part. A Appl. Sci. Manuf. 2021. V. 147. P. 106452. https://doi.org/10.1016/j.compositesa.2021.106452</mixed-citation></ref><ref id="B34"><label>34.</label><mixed-citation>3M. Developmental product: A new dimension of opportunity. 3D printing with 3M™ Dyneon™ fluoropolymers. (n. d.) https://www.3m.com/3M/en_US/fluoropolymers-us/technologies/3d-printing/ (accessed July 10, 2023).</mixed-citation></ref><ref id="B35"><label>35.</label><mixed-citation>Yao M., Ouyang X., Wu J., Zhang A.P., Tam H.-Y., Wai P.K.A. Optical Fiber-Tip Sensors Based on In-Situ µ-Printed Polymer Suspended-Microbeams // Sensors. 2018. V. 18. No 6. P. 1825. https://doi.org/10.3390/s18061825</mixed-citation></ref><ref id="B36"><label>36.</label><mixed-citation>Kotz F., Risch P., Helmer D., Rapp B. Highly Fluorinated Methacrylates for Optical 3D Printing of Microfluidic Devices // Micromachine. 2018. V. 9. P. 115. https://doi.org/10.3390/mi9030115</mixed-citation></ref><ref id="B37"><label>37.</label><mixed-citation>Lee J.N. Solvent-resistant perfluoropolyether (PFPE) microfluidic devices // California Institute of Technology. 2002. https://thesis.library.caltech.edu/4796/6/05_Chapter_5.pdf (accessed July 9, 2023).</mixed-citation></ref><ref id="B38"><label>38.</label><mixed-citation>Akimchenko I.O., Dubinenko G.E., Rutkowski S., Tverdokhlebov S.I., Vorobyev A.O., Bouznik V.M., Bolbasov E.N. One-step production of 3D printed ferroelectric polymer forms using fused deposition modeling // Appl. Phys. Lett. 2021. V. 119. https://doi.org/10.1063/5.0070365/40498</mixed-citation></ref><ref id="B39"><label>39.</label><mixed-citation>Vorob’ev A.O., Kul’bakin D.E., Chistyakov S.G., Mitrichenko A.D., Dubinenko G.E., Akimchenko I.O., Plotnikov E.V., Gogolev A.S., Choinzonov E.L., Buznik V.M., Bol’basov E.N. Individual 3D-Printed Implants Made from a Copolymer of Vinylidene Fluoride with Tetrafluoroethylene: Studies of the Effects of Steam Sterilization on Structure and Toxicity // Biomed. Eng. 2023. V. 57. P. 52–56. https://doi.org/10.1007/S10527-023-10266-Y/METRICS</mixed-citation></ref><ref id="B40"><label>40.</label><mixed-citation>Marandi M., Tarbutton J. Additive manufacturing of singleand double-layer piezoelectric PVDF-TrFE copolymer sensors // Procedia. Manuf. 2019. V. 34. P. 666–671. https://doi.org/10.1016/J.PROMFG.2019.06.194</mixed-citation></ref><ref id="B41"><label>41.</label><mixed-citation>Akimchenko I.O., Dubinenko G.E., Rutkowski S., Tverdokhlebov S.I., Vorobyev A.O., Bouznik V.M., Bolbasov E.N. One-step production of 3D printed ferroelectric polymer forms using fused deposition modeling // Appl. Phys. Lett. 2021. V. 119. https://doi.org/10.1063/5.0070365/40498</mixed-citation></ref><ref id="B42"><label>42.</label><mixed-citation>Vorob’ev A.O., Kul’bakin D.E., Chistyakov S.G., Mitrichenko A.D., Dubinenko G.E., Akimchenko I.O., Plotnikov E.V., Gogolev A.S., Choizhono E.L., Buznik V.M., Bol’basov E. Individual’nye implantaty, izgotovlennye metodom 3D-pechati iz sopolimera vinilidenftorida s tetraftorėtilenom: issledovanie vliyaniya parovoy sterilizatsii na strukturu i toksichnost’ [Individual implants manufactured by 3D printing from vinylidene fluoride-tetrafluoroethylene copolymer: a study of the effect of steam sterilization on structure and toxicity] // Meditsinskaya Tekhnika. 2023. V. 4. P. 40–43. http://www.mtjournal.ru/archive/2023/meditsinskaya-tekhnika‑1/individualnye-implantaty-izgotovlennye-metodom‑3d-pechati-iz-sopolimera-vinilidenftorida-s-tetraftor (accessed July 10, 2023).</mixed-citation></ref><ref id="B43"><label>43.</label><mixed-citation>Vorob’ev A.O., Kul’bakin D.E., Chistyakov S.G., Mitrichenko A.D., Dubinenko G.E., Akimchenko I.O., Plotnikov E.V., Gogolev A.S., Choinzonov E.L., Buznik V.M., Bol’basov E.N. Individual 3D-Printed Implants Made from a Copolymer of Vinylidene Fluoride with Tetrafluoroethylene: Studies of the Effects of Steam Sterilization on Structure and Toxicity // Biomed. Eng. 2023. V. 57. P. 52–56. https://doi.org/10.1007/S10527-023-10266-Y/METRICS</mixed-citation></ref><ref id="B44"><label>44.</label><mixed-citation>Synder Filtration. Ultrafiltration membranes. (n. d.). https://synderfiltration.com/ultrafiltration/membranes/ (accessed July 13, 2023).</mixed-citation></ref><ref id="B45"><label>45.</label><mixed-citation>Gore. Microfiltration Media for Pharmaceutical, Bioprocessing, Food &amp; Beverage Filtration. (n. d.). https://www.gore.com/products/microfiltration-media-for-pharmaceutical-bioprocessing-food-and-beverage-filtration (accessed July 13, 2023).</mixed-citation></ref><ref id="B46"><label>46.</label><mixed-citation>Merck Millipore. Durapore® membrane filter, 0.22 µm. (n. d.). https://www.merckmillipore.com/NL/en/product/Durapore-Membrane-Filter‑0.22m, MM_NF-GVWP04700? ReferrerURL=https%3A%2F%2Fwww.google.com%2F (accessed July 13, 2023).</mixed-citation></ref><ref id="B47"><label>47.</label><mixed-citation>Membrane Solutions. Hydrophobic PVDF membrane. (n. d.). https://www.membrane-solutions.com/pvdf_hydrophobic_membrane.htm (accessed July 13, 2023).</mixed-citation></ref><ref id="B48"><label>48.</label><mixed-citation>Membrane Solutions. Hydrophobic PTFE membrane. (n. d.). https://www.membrane-solutions.com/ptfe_filtration.htm (accessed July 13, 2023).</mixed-citation></ref><ref id="B49"><label>49.</label><mixed-citation>3M. Beverage membrane modules. (n. d.). https://www.3m.com/3M/en_US/membrana-us/products/industrial-filtration/liqui-flux-beverage-membrane-modules/ (accessed July 13, 2023).</mixed-citation></ref><ref id="B50"><label>50.</label><mixed-citation>Krackeler Scientific, Inc. Pall Gelman TF (PTFE) membranes. (n. d.). https://www.krackeler.com/catalog/product/3764/Pall-Gelman-TF-PTFE-Membranes (accessed July 13, 2023).</mixed-citation></ref><ref id="B51"><label>51.</label><mixed-citation>Pall Corporation. 0.2um, Emflon® PFRW hydrophobic PTFE membrane filters. (n. d.). https://shop.pall.com/us/en/food-beverage/soft-drinks/vent-filtration‑2/zidgri78m4r (accessed July 13, 2023).</mixed-citation></ref><ref id="B52"><label>52.</label><mixed-citation>Pall Corporation. Supor® beverage filter cartridges, AB3SBB7WH4 – Products. (n. d.). https://shop.pall.com/us/en/food-beverage/wine/final-filtration-microbial-stabilization‑1/zidAB3SBB7WH4? CategoryName=&amp;CatalogID=&amp;tracking=searchterm: (accessed July 13, 2023).</mixed-citation></ref><ref id="B53"><label>53.</label><mixed-citation>Apel P.Yu., Dmitriev S.N. Treckovye membrany [Track membranes]. In A. B. Yaroslavtsev (Ed.) // Membrany i membrannye tekhnologii [Membranes and membrane technologies]. 2013.</mixed-citation></ref><ref id="B54"><label>54.</label><mixed-citation>Guo Q., Huang Y., Xu M., Huang Q., Cheng J., Yu S., Zhang Y., Xiao C. PTFE porous membrane technology: A comprehensive review // J. Memb. Sci. 2022. V. 664. P. 121115. https://doi.org/10.1016/J.MEMSCI.2022.121115</mixed-citation></ref><ref id="B55"><label>55.</label><mixed-citation>DuPont. Fluorocarbon vinyl ether polymers (US3282875A) // Google Patents. 1966. https://patents.google.com/patent/US3282875A/en (accessed October 29, 2024).</mixed-citation></ref><ref id="B56"><label>56.</label><mixed-citation>Astakhov E., Astakhova A., Tsarin P., Kolganov I., Gorobets S. Primenenie termokhimicheski stoikikh fil’truyushchikh materialov v mikroelektronnoi promyshlennosti [Application of thermochemically stable filtering materials in microelectronic industry] // Electronics: Science, Technology, Business. 2019. V. 188. P. 128–132. https://doi.org/10.22184/1992-4178.2019.188.7.128.132</mixed-citation></ref><ref id="B57"><label>57.</label><mixed-citation>Astakhov E., Astakhova A., Tsarin P., Kolganov I., Gorobets S., Dymova A. Primenenie novykh poristykh materialov dlya nuzh razlichnykh otrasley promyshlennosti [Application of new porous materials for the needs of various industries] // Electronics: Science, Technology, Business. 2019. V. 189. P. 130–134. https://doi.org/10.22184/1992-4178.2019.189.8.130.134</mixed-citation></ref><ref id="B58"><label>58.</label><mixed-citation>Astakhov E.Yu., Bol’bit N.M., Klinshpont E.R., Tsarin P.G. Kharakteristiki poristykh plenok iz politetraftorétilena, poluchennykh na osnove suspensiy poroshkov v spirte [Characteristics of porous polytetrafluoroethylene films obtained from powder suspensions in alcohol] // Kriticheskie Tekhnologii. Membrany. 2005. V. 3. P. 34–40.</mixed-citation></ref><ref id="B59"><label>59.</label><mixed-citation>Grakovich P.N., Ivanov L.F., Kalinin L.A., Ryabchenko I.L., Tolstopyatov E.M., Krasovsky, A.M. Lazernaya ablyatsiya politetraftorétilena [Laser ablation of polytetrafluoroethylene] // Rossiyskiy Khimicheskiy Zhurnal, 2008. V. 3. P. 97–105.</mixed-citation></ref><ref id="B60"><label>60.</label><mixed-citation>Su C., Chang J., Tang K., Gao F., Li Y., Cao H., Novel three-dimensional superhydrophobic and strength-enhanced electrospun membranes for long-term membrane distillation // Sep. Purif. Technol. 2017. V. 178. P. 279–287. https://doi.org/10.1016/j.seppur.2017.01.050</mixed-citation></ref><ref id="B61"><label>61.</label><mixed-citation>Lee E.-J., An A.K., Hadi P., Lee S., Woo Y.C., Shon H.K. Advanced multi-nozzle electrospun functionalized titanium dioxide/polyvinylidene fluoride-co-hexafluoropropylene (TiO2/PVDF-HFP) composite membranes for direct contact membrane distillation // J. Memb. Sci. 2017. V. 524. P. 712–720. https://doi.org/10.1016/j.memsci.2016.11.069.</mixed-citation></ref><ref id="B62"><label>62.</label><mixed-citation>Seyed Shahabadi S.M., Rabiee H., Seyedi S.M., Mokhtare A., Brant J.A. Superhydrophobic dual layer functionalized titanium dioxide/polyvinylidene fluorideco -hexafluoropropylene (TiO2/PH) nanofibrous membrane for high flux membrane distillation // J. Memb. Sci. 2017. V. 537. P. 140–150. https://doi.org/10.1016/j.memsci.2017.05.039.</mixed-citation></ref><ref id="B63"><label>63.</label><mixed-citation>Tverdokhlebova T.S., Bolbasov E.N., Bouznik V.M. Composition Polymeric Membranes Based on the VDF-TeFE Copolymer Formed by Electrospinning // IOP Conf. Ser. Mater. Sci. Eng. 2020. V. 731. P. 012022. https://doi.org/10.1088/1757-899X/731/1/012022</mixed-citation></ref><ref id="B64"><label>64.</label><mixed-citation>Badaraev A.D., Koniaeva A., Krikova S.A., Shesterikov E.V., Bolbasov E.N., Nemoykina A.L., Bouznik V.M., Stankevich K.S., Zhukov Y.M., Mishin I.P., Varakuta E.Y., Tverdokhlebov S.I. Piezoelectric polymer membranes with thin antibacterial coating for the regeneration of oral mucosa // Appl. Surf. Sci. 2020. V. 504. P. 144068. https://doi.org/10.1016/j.apsusc.2019.144068</mixed-citation></ref><ref id="B65"><label>65.</label><mixed-citation>Kolesnik I., Tverdokhlebova T., Danilenko N., Plotnikov E., Kulbakin D., Zheravin A., Bouznik V., Bolbasov E. Characterization and Determination of the Biocompatibility of Porous Polytetrafluoroethylene Membranes Fabricated via Electrospinning // J. Fluor. Chem. 2021. V. 246. P. 109798. https://doi.org/10.1016/J.JFLUCHEM.2021.109798</mixed-citation></ref><ref id="B66"><label>66.</label><mixed-citation>Zaarour B., Zhu L., Huang C., Jin X. Fabrication of a polyvinylidene fluoride cactus-like nanofiber through one-step electrospinning // RSC Adv. 2018. V. 8. P. 42353–42360. https://doi.org/10.1039/C8RA09257E</mixed-citation></ref><ref id="B67"><label>67.</label><mixed-citation>Asai H., Kikuchi M., Shimada N., Nakane K. Effect of melt and solution electrospinning on the formation and structure of poly(vinylidene fluoride) fibres // RSC Adv. 2017. V. 7. P. 17593–17598. https://doi.org/10.1039/C7RA01299C</mixed-citation></ref><ref id="B68"><label>68.</label><mixed-citation>Zheng J., He A., Li J., Han C.C. Polymorphism Control of Poly(vinylidene fluoride) through Electrospinning // Macromol Rapid Commun. 2007. V. 28. P. 2159–2162. https://doi.org/10.1002/marc.200700544</mixed-citation></ref><ref id="B69"><label>69.</label><mixed-citation>Gopal R., Kaur S., Ma Z., Chan C., Ramakrishna S., Matsuura T. Electrospun nanofibrous filtration membrane // J. Memb. Sci. 2006. V. 281. 581–586. https://doi.org/10.1016/j.memsci.2006.04.026.</mixed-citation></ref><ref id="B70"><label>70.</label><mixed-citation>Gee S., Johnson B., Smith A.L. Optimizing electrospinning parameters for piezoelectric PVDF nanofiber membranes // J. Memb. Sci. 2018. V. 563. P. 804–812. https://doi.org/10.1016/j.memsci.2018.06.050</mixed-citation></ref><ref id="B71"><label>71.</label><mixed-citation>Shibuya M., Park M.J., Lim S., Phuntsho S., Matsuyama H., Shon H.K. Novel CA/PVDF nanofiber supports strategically designed via coaxial electrospinning for high performance thin-film composite forward osmosis membranes for desalination // Desalination. 2018. V. 445. P. 63–74. https://doi.org/10.1016/j.desal.2018.07.025</mixed-citation></ref><ref id="B72"><label>72.</label><mixed-citation>Liu C., Li X., Liu T., Liu Z., Li N., Zhang Y., Xiao C., Feng X. Microporous CA/PVDF membranes based on electrospun nanofibers with controlled crosslinking induced by solvent vapor // J. Memb. Sci. 2016. V. 512. P. 1–12. https://doi.org/10.1016/j.memsci.2016.03.062</mixed-citation></ref><ref id="B73"><label>73.</label><mixed-citation>Lins L.C., Wianny F., Livi S., Dehay C., Duchet‐Rumeau J., Gérard J. Effect of polyvinylidene fluoride electrospun fiber orientation on neural stem cell differentiation // J. Biomed. Mater. Res. B Appl. Biomater. 2017. V. 105. P. 2376–2393. https://doi.org/10.1002/jbm.b.33778</mixed-citation></ref><ref id="B74"><label>74.</label><mixed-citation>Fang C., Yang S., Zhao X., Du P., Xiong J. Electrospun montmorillonite modified poly(vinylidene fluoride) nanocomposite separators for lithium-ion batteries // Mater. Res. Bull. 2016. V. 79. P. 1–7. https://doi.org/10.1016/j.materresbull.2016.02.015</mixed-citation></ref><ref id="B75"><label>75.</label><mixed-citation>Costa C.M., Lizundia E., Lanceros-Méndez S. Polymers for advanced lithium-ion batteries: State of the art and future needs on polymers for the different battery components // Prog. Energy. Combust. Sci. 2020. V. 79. P. 100846. https://doi.org/10.1016/j.pecs.2020.100846</mixed-citation></ref><ref id="B76"><label>76.</label><mixed-citation>Qing W., Shi X., Deng Y., Zhang W., Wang J., Tang C.Y. Robust superhydrophobic-superoleophilic polytetrafluoroethylene nanofibrous membrane for oil/water separation // J. Memb. Sci. 2017. V. 540. P. 354–361. https://doi.org/10.1016/j.memsci.2017.06.060</mixed-citation></ref><ref id="B77"><label>77.</label><mixed-citation>C. Su, Y. Li, H. Cao, C. Lu, Y. Li, J. Chang, Duan F. Novel PTFE hollow fiber membrane fabricated by emulsion electrospinning and sintering for membrane distillation // J. Memb. Sci. 2019. V. 583. P. 200–208. https://doi.org/10.1016/j.memsci.2019.04.037</mixed-citation></ref><ref id="B78"><label>78.</label><mixed-citation>Zhao P., Soin N., Prashanthi K., Chen J., Dong S., Zhou E., Zhu Z., Narasimulu A.A., Montemagno C.D., Yu L., Luo J. Emulsion Electrospinning of Polytetrafluoroethylene (PTFE) Nanofibrous Membranes for High-Performance Triboelectric Nanogenerators // ACS Appl. Mater. Interfaces. 2018. V. 10. 5880–5891. https://doi.org/10.1021/ACSAMI.7B18442/ASSET/IMAGES/LARGE/AM‑2017-18442Q_0007.JPEG</mixed-citation></ref><ref id="B79"><label>79.</label><mixed-citation>Wakabayashi H., Yamagami S., Ikezawa N., Ogura A., Narihiro M., Arai K., Ochiai Y., Takeuchi K., Yamamoto T., Mogami T. Sub‑10-nm planar-bulk-CMOS devices using lateral junction control // IEEE International Electron Devices Meeting. 2003. P. 20.7.1–20.7.3. https://doi.org/10.1109/IEDM.2003.1269446</mixed-citation></ref><ref id="B80"><label>80.</label><mixed-citation>Lee H., Yu L.E., Ryu S. W., Han J.W., Jeon K., Jang D.Y., Kim K.H., Lee J., Kim J.H., Jeon S.C., Lee G.S., Oh J.S., Park Y.C., Bae W.H., Lee H.M, Yang J.M., Yoo J.J., Kim S.I., Choi Y.K. Sub‑5nm all-around gate FinFET for ultimate scaling, Digest of Technical Papers // Symposium on VLSI Technology/ 2006. P. 58–59. https://doi.org/10.1109/VLSIT.2006.1705215</mixed-citation></ref><ref id="B81"><label>81.</label><mixed-citation>Bracciale M.P., Capasso L., Sarasini F., Tirillò J., Santarelli M.L. Effect of Aging on the Mechanical Properties of Highly Transparent Fluoropolymers for the Conservation of Archaeological Sites // Polymers. 2022. V. 14. P. 912. https://doi.org/10.3390/POLYM14050912/S1</mixed-citation></ref><ref id="B82"><label>82.</label><mixed-citation>Zhao S., Zhao J., Wen M., Yao M., Wang F., Huang F., Zhang Q., Cheng Y.B., Zhong J. Sequentially Reinforced Additive Coating for Transparent and Durable Superhydrophobic Glass // Langmuir. 2018. V. 34. P. 11316–11324. https://doi.org/10.1021/ACS.LANGMUIR.8B01960/ASSET/IMAGES/LARGE/LA‑2018-01960K_0007.JPEG</mixed-citation></ref><ref id="B83"><label>83.</label><mixed-citation>Holscot Europe. Properties of FEP, PFA, ETFE and PTFE. (n. d.). http://www.holscoteurope.com/en/materials/ (accessed July 6, 2023).</mixed-citation></ref><ref id="B84"><label>84.</label><mixed-citation>Galante A.M.S., Galante O.L., Campos L.L. Study on application of PTFE, FEP and PFA fluoropolymers on radiation dosimetry // Nucl. Instrum. Methods. Phys. Res. A. 2010. V. 619. P. 177–180. https://doi.org/10.1016/j.nima.2009.10.103</mixed-citation></ref><ref id="B85"><label>85.</label><mixed-citation>UV Solutions. Use of fluoropolymers in UV sterilization equipment. 2021. https://uvsolutionsmag.com/articles/2021/use-of-fluoropolymers-in-uv-sterilization-equipment/ (accessed July 6, 2023).</mixed-citation></ref><ref id="B86"><label>86.</label><mixed-citation>Grosfils P., Lutsko J.F. Impact of Surface Roughness on Crystal Nucleation // Crystals. 2020. V. 11. No 4. https://doi.org/10.3390/cryst11010004</mixed-citation></ref><ref id="B87"><label>87.</label><mixed-citation>Vitlab. Продукты из фторопласта: VITLAB изделия для лаборатории (RU) [Fluoroplastic products: VITLAB laboratory equipment (RU)]. (n. d.). https://www.vitlab.com/ru/produkty/informacija/produkty-iz-ftoroplasta/ (accessed July 10, 2023).</mixed-citation></ref><ref id="B88"><label>88.</label><mixed-citation>Elliott L.D., Knowles J.P., Koovits P.J., Maskill K.G., Ralph M.J., Lejeune G., Edwards L.J., Robinson R.I., Clemens I.R., Cox B., Pascoe D.D., Koch G., Eberle M., Berry M.B., Booker‐Milburn K.I. Batch versus Flow Photochemistry: A Revealing Comparison of Yield and Productivity // Chemistry – A European Journal. 2014. V. 20. P. 15226–15232. https://doi.org/10.1002/chem.201404347</mixed-citation></ref><ref id="B89"><label>89.</label><mixed-citation>Cambié D., Bottecchia C., Straathof N.J.W., Hessel V., Noël T. Applications of Continuous-Flow Photochemistry in Organic Synthesis, Material Science, and Water Treatment // Chem. Rev. 2016. V. 116. P. 10276–10341. https://doi.org/10.1021/acs.chemrev.5b00707</mixed-citation></ref><ref id="B90"><label>90.</label><mixed-citation>Szymborski T., Jankowski P., Garstecki P. Teflon microreactors for organic syntheses // Sens Actuators B Chem. 2018. V. 255. P. 2274–2281. https://doi.org/10.1016/j.snb.2017.09.035</mixed-citation></ref><ref id="B91"><label>91.</label><mixed-citation>Szymborski T., Jankowski P., Ogończyk D., Garstecki P. An FEP Microfluidic Reactor for Photochemical Reactions // Micromachines. 2018. V. 9 P. 156. https://doi.org/10.3390/mi9040156.</mixed-citation></ref><ref id="B92"><label>92.</label><mixed-citation>Elvira K.S., Gielen F., Tsai S.S.H., Nightingale A.M. Materials and methods for droplet microfluidic device fabrication // Lab. Chip. 2022. V. 22. P. 859–875. https://doi.org/10.1039/D1LC00836F</mixed-citation></ref><ref id="B93"><label>93.</label><mixed-citation>Engineers Edge. Particle size and distribution air / fluid filter – Filtration. (n. d.). https://www.engineersedge.com/filtration/filtration_particle_size.htm (accessed September 13, 2023).</mixed-citation></ref><ref id="B94"><label>94.</label><mixed-citation>Hussain A., Janson A., Matar J. M., Adham S. Membrane distillation: recent technological developments and advancements in membrane materials // Emergent Mater. 2022. V. 5. P. 347–367. https://doi.org/10.1007/s42247-020-00152-8</mixed-citation></ref><ref id="B95"><label>95.</label><mixed-citation>Synder Filtration. Ultrafiltration membranes. (n. d.). https://synderfiltration.com/ultrafiltration/membranes/ (accessed July 13, 2023).</mixed-citation></ref><ref id="B96"><label>96.</label><mixed-citation>Yanpai Deutschland Technische Textilien GmbH. PTFE membrane. (n. d.). https://www.yanpai.de/ptfe-membrane‑1 (accessed July 13, 2023).</mixed-citation></ref><ref id="B97"><label>97.</label><mixed-citation>Zhao J., Shi L., Loh C.H., Wang R. Preparation of PVDF/PTFE hollow fiber membranes for direct contact membrane distillation via thermally induced phase separation method // Desalination. 2018. V. 430. P. 86–97. https://doi.org/10.1016/J.DESAL.2017.12.041</mixed-citation></ref><ref id="B98"><label>98.</label><mixed-citation>Pu L., Xu Y., Xia Q., Ding J., Wang Y., Shan C., Wu D., Zhang Q., Gao G., Pan B. Ferroelectric membrane for water purification with arsenic as model pollutant // Chemical Engineering Journal. 2021. V. 403. P. 126426. https://doi.org/10.1016/j.cej.2020.126426</mixed-citation></ref><ref id="B99"><label>99.</label><mixed-citation>American Air Filter Thailand. Microelectronics clean air solutions. (2021). https://www.aafthailand.com/wp-content/uploads/2021/07/Microelectronics_MAFP‑99-101A.pdfSolutions, (accessed August 1, 2023).</mixed-citation></ref><ref id="B100"><label>100.</label><mixed-citation>Zhou Y., Liu Y., Zhang M., Feng Z., Yu D.-G., Wang K. Electrospun Nanofiber Membranes for Air Filtration: A Review // Nanomaterials. 2022. V. 12. P. 1077. https://doi.org/10.3390/nano12071077</mixed-citation></ref><ref id="B101"><label>101.</label><mixed-citation>Li X., Wang X.-X., Yue T.-T., Xu Y., Zhao M.-L., Yu M., Ramakrishna S., Long Y.-Z. Waterproof-breathable PTFE nanoand Microfiber Membrane as High Efficiency PM2.5 Filter // Polymers. 2019. V. 11. P. 590. https://doi.org/10.3390/polym11040590</mixed-citation></ref><ref id="B102"><label>102.</label><mixed-citation>Vanangamudi A., Hamzah S., Singh G. Synthesis of hybrid hydrophobic composite air filtration membranes for antibacterial activity and chemical detoxification with high particulate filtration efficiency (PFE) // Chemical Engineering Journal. 2015. V. 260. P. 801–808. https://doi.org/10.1016/j.cej.2014.08.062</mixed-citation></ref><ref id="B103"><label>103.</label><mixed-citation>Huang Z.-X., Liu X., Zhang X., Wong S.-C., Chase G.G., Qu J.-P., Baji A. Electrospun polyvinylidene fluoride containing nanoscale graphite platelets as electret membrane and its application in air filtration under extreme environment // Polymer. 2017. V. 131. P. 143–150. https://doi.org/10.1016/j.polymer.2017.10.033</mixed-citation></ref><ref id="B104"><label>104.</label><mixed-citation>He W., Guo Y., Zhao Y.-B., Jiang F., Schmitt J., Yue Y., Liu J., Cao J., Wang J. Self-supporting smart air filters based on PZT/PVDF electrospun nanofiber composite membrane // Chemical Engineering Journal. 2021. V. 423. P. 130247. https://doi.org/10.1016/j.cej.2021.130247</mixed-citation></ref><ref id="B105"><label>105.</label><mixed-citation>Mazhar S.I., Shafi H.Z., Shah A., Asma M., Gul S., Raffi M. Synthesis of surface modified hydrophobic PTFE-ZnO electrospun nanofibrous mats for removal of volatile organic compounds (VOCs) from air // Journal of Polymer Research. 2020. V. 27. P. 1–13. https://doi.org/10.1007/S10965-020-02218-X/TABLES/3</mixed-citation></ref><ref id="B106"><label>106.</label><mixed-citation>Zheng G., Shao Z., Chen J., Jiang J., Zhu P., Wang X., Li W., Liu Y. Self-Supporting Three-Dimensional Electrospun Nanofibrous Membrane for Highly Efficient Air Filtration // Nanomaterials. 2021. V. 11. P. 2567. https://doi.org/10.3390/nano11102567</mixed-citation></ref><ref id="B107"><label>107.</label><mixed-citation>Shen H., Zhou Z., Wang H., Zhang M., Han M., Durkin D.P., Shuai D., Shen Y. Development of Electrospun Nanofibrous Filters for Controlling Coronavirus Aerosols // Environ Sci. Technol. Lett. 2021. V. 8. P. 545–550.</mixed-citation></ref><ref id="B108"><label>108.</label><mixed-citation>Bui T.T., Shin M.K., Jee S.Y., Long D.X., Hong J., Kim M.-G. Ferroelectric PVDF nanofiber membrane for high-efficiency PM0.3 air filtration with low air flow resistance // Colloids Surf. A Physicochem. Eng. Asp. 2022. V. 640. P. 128418. https://doi.org/10.1016/j.colsurfa.2022.128418</mixed-citation></ref></ref-list></back></article>
