Russian MicroelectronicsRussian MicroelectronicsМикроэлектроника0544-12693034-5480The Russian Academy of Sciences69916510.7868/S3034548025060051MODELINGМОДЕЛИРОВАНИЕResearch ArticleA COMPACT ELECTROSTATIC ACTUATOR WITH ENHANCED CONTACT FORCE FOR RESISTIVE MEMS SWITCHМИНИАТЮРНЫЙ ЭЛЕКТРОСТАТИЧЕСКИЙ АКТЮАТОР С УВЕЛИЧЕННОЙ СИЛОЙ ПРИЖИМА ДЛЯ РЕЗИСТИВНОГО МЭМС-ПЕРЕКЛЮЧАТЕЛЯUvarovI. V.УваровИ. В.i.v.uvarov@bk.ruBelozerovI. A.БелозеровИ. А.email@example.comNRC "Kurchatov Institute" — Valiev IPT, Yaroslavl BranchЦентр научно-информационных технологий — Ярославль Отделения физико-технологических исследований имени К.А. Валиева НИЦ «Курчатовский Институт»P.G. Demidov Yaroslavl State UniversityЯрославский государственный университет им. П.Г. Демидова15122025546VOL 54, NO6 (2025)ТОМ 54, №6 (2025)51652723122025Copyright ©; 2025, Russian Academy of SciencesCopyright ©; 2025, Российская академия наук2025Russian Academy of SciencesРоссийская академия наукhttps://journals.eco-vector.com/0544-1269/article/view/699165

Micromechanical switches are of great interest for microwave electronics, but their implementation is hampered by low reliability. Micron-sized actuators develop low contact force, which does not allow achieving low and stable contact resistance. The force is increased by using large-sized and complex-shaped electrodes, but a compact and simple actuator is preferable. The paper describes methods for increasing the contact force of a MEMS switch with electrostatic actuation. They are demonstrated on a compact actuator with a movable electrode in the form of a 50 μm long cantilever. Selection of vertical dimensions increases the force from 10 to 115 μN and exceeding the required threshold of 100 μN with a reserve. The restoring force also increases and protects the switch from stiction. Combining several actuators and removing intermediate contact bumps additionally increases the specific force by at least 50% compared to a single device.

Микромеханические переключатели представляют значительный интерес для СВЧ-электроники, однако их внедрению препятствует невысокая надежность. Актюаторы микронного размера развивают малую силу прижима контактов, не позволяющую достичь низкого и стабильного контактного сопротивления. Силу увеличивают за счет использования электродов большого размера и сложной формы, но компактный и простой привод более предпочтителен. В статье описаны методы увеличения контактной силы МЭМС-переключателя с электростатическим управлением. Они продемонстрированы на миниатюрном актюаторе с подвижным электродом в форме кантилевера длиной 50 мкм. Подбор вертикальных размеров позволяет нарастить силу с 10 до 115 мкН и с запасом преодолеть необходимый порог 100 мкН. Размыкающая сила также возрастает и обеспечивает защиту ключа от залипания. Объединение нескольких актюаторов и удаление промежуточных контактных выступов дополнительно повышают удельную силу по меньшей мере на 50% по сравнению с одиночным устройством.

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