Diamond UV detector with graphite electrodes formed by laser ablation

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Abstract

A Diamond being a wide-bandgap radiation-hard semiconductor, is rather promising for the development of UV detectors, including the solar-blind ones. A version of an all-carbon UV detector has been implemented on a single-crystal CVD diamond wafer with the interdigital electrodes consisting of a system of shallow (near-surface) and deep graphitized grooves produced by laser ablation without any lithography. Simulation of the electric field distribution in the detector has demonstrated the advantage of using buried electrodes that provide a more uniform field distribution within the crystal. The photosensitivity spectra exhibit a sharp peak at 220 nm, with the buried electrodes providing a 75% higher response amplitude (14 A/W).

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About the authors

Viktor G. Ralchenko

Prokhorov General Physics Institute of the RAS; Harbin Institute of Technology

Author for correspondence.
Email: vg_ralchenko@mail.ru
ORCID iD: 0000-0002-2213-4224

Cand.of Sc.(Phys.&Math.), Head of the Diamond Materials Laboratory, Natural Sciences Center

Russian Federation, Moscow; China, Harbin

Vladimir P. Pashinin

Prokhorov General Physics Institute of the RAS

Email: vppashinin@gmail.com
ORCID iD: 0000-0002-9257-804X

Researcher, Surface Laser Optics Laboratory, Natural Sciences Center

Russian Federation, Moscow

Alexey F. Popovich

Prokhorov General Physics Institute of the RAS; Kotel’nikov Institute of Radio Engineering and Electronics of the RAS

Email: lex78@mail.ru
ORCID iD: 0000-0002-1389-5697

Engineer, Senior Engineer, Diamond Materials Laboratory, Natural Sciences Center

Russian Federation, Moscow; Fryazino, Moscow region

Andrey P. Bolshakov

Prokhorov General Physics Institute of the RAS

Email: bolshak3@yandex.ru
ORCID iD: 0000-0002-9190-5766

Cand.of Sc.(Phys.&Math.), Senior Researcher, Diamond Materials Laboratory, Natural Sciences Center

Russian Federation, Moscow

Artem K. Martyanov

Prokhorov General Physics Institute of the RAS

Email: art.martyanov@gmail.com
ORCID iD: 0000-0002-3196-5695

Cand.of Sc.(Phys.&Math.), Senior Researcher, Diamond Materials Laboratory, Natural Sciences Center

Russian Federation, Moscow

Kirill V. Zakharchenko

Prokhorov General Physics Institute of the RAS; Moscow State Technical University of Civil Aviation

Email: nanophys@mail.ru
ORCID iD: 0000-0003-3144-714X

Cand.of Sc.(Phys.&Math.), Researcher, Diamond Materials Laboratory, Natural Sciences Center, Associate Professor, Department of Physics

Russian Federation, Moscow; Moscow

Vitaly I. Konov

Prokhorov General Physics Institute of the RAS

Email: vik@nsc.gpi.ru
ORCID iD: 0000-0002-1135-5566

Dr.of Sc.(Phys.&Math.), acad. RAS, Head of the Natural Sciences Center

Russian Federation, Moscow

Bing Dai

Harbin Institute of Technology

Email: daibinghit@vip.126.com
ORCID iD: 0000-0002-1170-4084

Cand.of Sc.(Phys.&Math.), Assistant Prof.

China, Harbin

References

  1. Shimaoka T., Koizumi S., Kaneko J. H. Recent progress in diamond radiation detectors. Functional Diamond. 2022; 1(1): 205–20. doi: 10.1080/26941112.2021.2017758.
  2. Angelone M., Verona C. Properties of Diamond-Based Neutron Detectors Operated in Harsh Environments. Journal of Nuclear Engineering. 2021; 2(4): 422–70. doi: 10.3390/jne2040032.
  3. Krasilnikov A.V., Rodionov N. B., Bol’shakov A.P., Ral’chenko V.G., Vartapetov S. K., Sizov Y. E., Meshchaninov S. A., Trapeznikov A. G., Rodionova V. P., Amosov V. N. CVD-synthesis of detector quality diamond for radiation hardness detectors of ionizing radiation. ZhurnalTekhnicheskoiFiziki. 2022; 92(4): 596–603.
  4. Girolami M., Allegrini P., Conte G., Trucchi D. M., Ralchenko V. G., Salvatori S. Diamond Detectors for UV and X-Ray Source Imaging. IEEE Electron Device Letters. 2012; 33(2): 224–6. doi: 10.1109/LED.2011.2176907.
  5. di Franco F., Rosuel N., Gallin-Martel L., Gallin-Martel M.-L., Ghafooryan-Sangchooli M., Keshmiri S., Motte J.-F., Muraz J.-F., Pellicioli P., Ruat M., Serduc R., Verry C., Dauvergne D., Adam J.-F. Monocrystalline diamond detector for online monitoring during synchrotron microbeam radiotherapy. J. Synchrotron Rad. 2023; 30(6): 1076–85. doi: 10.1107/S160057752300752X.
  6. Salvatori S., Girolami M., Oliva P., Conte G., Bolshakov A., Ralchenko V., Konov V. Diamond device architectures for UV laser monitoring. Laser Phys. 2016; 26(8): 084005. doi: 10.1088/1054-660X/26/8/084005.
  7. Fei H., Sang D., Zou L., Ge S., Yao Y., Fan J., Wang C., Wang Q. Research progress of optoelectronic devices based on diamond materials. Front Phys. 2023; 11. doi: 10.3389/fphy.2023.1226374.
  8. Lin C., Lu Y., Yang X., Tian Y., Gao C., Sun J., Dong L., Zhong F., Hu W., Shan C. Diamond-Based All-Carbon Photodetectors for Solar-Blind Imaging. Advanced Optical Materials. 2018; 6(15): 1800068. doi: 10.1002/adom.201800068.
  9. Mildren R., Rabeau J. Optical engineering of diamond. – John Wiley & Sons; 2013.
  10. Ralchenko V.G., Savel’ev A.V., Konov V. I., Mazzeo G., Spaziani F., Conte G., Polyakov V. I. Polycrystalline diamond film UV detectors for excimer lasers. Quantum Electron. 2006; 36(6): 487–8. doi: 10.1070/QE2006v036n06ABEH013211.
  11. Liao M., Sang L., Teraji T., Imura M., Alvarez J., Koide Y. Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors. Jpn J. Appl. Phys. 2012; 51(9R): 090115. doi: 10.1143/JJAP.51.090115.
  12. Lin C., Lu Y., Tian Y., Gao C., Fan M., Yang X., Dong L., Shan C. Diamond based photodetectors for solar-blind communication. Opt Express. 2019; 27(21): 29962–71. doi: 10.1364/OE.27.029962.
  13. Li F.N., Bao H. W., Li Y., Ma F., Wang H. X. Laser induced diamond/graphite structure for all-carbon deep-ultraviolet photodetector. Applied Surface Science. 2023; 636: 157818. doi: 10.1016/j.apsusc.2023.157818.
  14. Olivero P., Forneris J., Jakšić M., Pastuović Ž., Picollo F., Skukan N., Vittone E. Focused ion beam fabrication and IBIC characterization of a diamond detector with buried electrodes. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 2011; 269(20): 2340–4. doi: 10.1016/j.nimb.2011.02.021.
  15. Jiang M., Jia Z., Qiu M., Chen X., Cai J., Yang M., Shen Y., Liu C., Chee K. W. A., Jiang N., Nishimura K., Li Q., Yuan Q., Li H. A High-Performance All-Carbon Diamond Pixel Solar-Blind Detector with In Situ Converted Graphene Electrodes. Materials. 2025; 18(6): 1222. doi: 10.3390/ma18061222.
  16. Komlenok M., Bolshakov A., Ralchenko V., Konov V., Conte G., Girolami M., Oliva P., Salvatori S. Diamond detectors with laser induced surface graphite electrodes. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2016; 837: 136–42. doi: 10.1016/j.nima.2016.09.019.
  17. Yurov V., Bushuev E., Bolshakov A., Ashkinazi E., Antonova I., Zavedeev E., Khomich A., Voronov V., Ralchenko V. Etching Kinetics of (100) Single Crystal Diamond Surfaces in a Hydrogen Microwave Plasma, Studied with In Situ Low-Coherence Interferometry. Physica Status Solidi (a). 2017; 214(11): 1700177. doi: 10.1002/pssa.201700177.
  18. Forneris J., Lo Giudice A., Olivero P., Picollo F., Re A., Marinelli M., Pompili F., Verona C., Verona Rinati G., Benetti M., Cannata D., Di Pietrantonio F. A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors. Europhysics Letters. 2014; 108(1): 18001. doi: 10.1209/0295-5075/108/18001.
  19. Liu K., Dai B., Ralchenko V., Xia Y., Quan B., Zhao J., Shu G., Sun M., Gao G., Yang L., Lei P., Han J., Zhu J. Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity. Sensors and Actuators A: Physical. 2017; 259: 121–6. doi: 10.1016/j.sna.2017.01.027.
  20. Kononenko T., Ralchenko V., Bolshakov A., Konov V., Allegrini P., Pacilli M., Conte G., Spiriti E. All-carbon detector with buried graphite pillars in CVD diamond. Appl Phys A. 2014; 114(2): 297–300. doi: 10.1007/s00339-013-8091-7.
  21. Bloomer C., Newton M. E., Rehm G., Salter P. S. A single-crystal diamond X-ray pixel detector with embedded graphitic electrodes. J. Synchrotron Rad. 2020; 27(3): 599–607. doi: 10.1107/S160057752000140X.
  22. Komlenok M.S., Tikhodeev S. G., Khomich A. A., Lebedev S. P., Komandin G. A., Konov V. I. Optical properties of laser-modified diamond: From visible to microwave range. Quantum Electron. 2019; 49(7): 672–5. doi: 10.1070/QEL16930.
  23. Liu Z., Ao J.-P., Li F., Wang W., Wang J., Zhang J., Wang H.-X. Fabrication of three dimensional diamond ultraviolet photodetector through down-top method. Appl Phys Lett. 2016; 109(15): 153507. doi: 10.1063/1.4965027.

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2. Fig. 1. Diamond surface with the graphite interdigital electrodes (dark stripes) and a contact pad (bottom part), the electrode depth is 0.7 μm, the gap between them is 50 μm: a) optical microscope imaging; b) optical profilometer imaging; с) Raman scattering spectra for a shallow (upper spectrum) and deep (lower spectrum) graphite electrode (Insert: Raman scattering spectrum of an unirradiated substrate)

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3. Fig. 2. Field distributions E in the cross section of structures with electrodes (the distance between the electrodes is 50 μm, the bias is U = 50 V): a) the near-surface electrodes; b) buried electrodes (at a depth of 20 μm) (insert: coding of the field strength in the range of 10‒²–2 V/μm in pseudocolor)

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4. Fig. 3. Current-voltage characteristics of the dark current (left curves) and photocurrent under illumination at a wavelength of 220 nm (right curves) for the samples D0.7 (blue curves) and D16 (red curves)

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5. Fig. 4. Spectral sensitivity of UV-photodetectors with the near-surface (black spectrum) and buried graphite electrodes (red spectrum) on a logarithmic scale (voltage on the electrodes is 10 V)

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Copyright (c) 2025 Ralchenko V.G., Pashinin V.P., Popovich A.F., Bolshakov A.P., Martyanov A.K., Zakharchenko K.V., Konov V.I., Dai B.