Metrology in scanning probe microscopy

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Abstract

The evolution of atomic force microscopy from an imaging method to a quantitative measurement tool highlights the problem of precise calibration. Traditional static standards do not provide the necessary versatility and accuracy at the subnanometer level. This paper presents a new approach to probe microscopy metrology based on the use of a dynamic measurement standard. This approach involves the use of a additional fourth piezomanipulator in addition to the three existing, strictly calibrated piezomanipulator, which moves the sample a precisely defined distance, creating a reference relief directly during scanning. This enables calibration of the scanning system along the X, Y, and Z axes without the need for special test structures, directly on the sample under study. The FemtoScan microscope’s vertical resolution, controlled down to 0.2 Å, is experimentally demonstrated, opening up new possibilities for precise nanoscale measurements.

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About the authors

D. I. Yaminsky

Lomonosov Moscow State University

Email: yaminsky@nanoscopy.ru
ORCID iD: 0009-0009-6370-7496

Physical Department, Post Graduate

Russian Federation, Moscow

A. I. Akhmetova

Lomonosov Moscow State University; Advanced Technologies Center

Email: yaminsky@nanoscopy.ru
ORCID iD: 0000-0002-5115-8030

Physical Department, Cand. of Sci. (Physics and Mathematics), Senior Researcher, Leading Specialist

Russian Federation, Moscow; Moscow

I. V. Yaminsky

Lomonosov Moscow State University; Advanced Technologies Center

Author for correspondence.
Email: yaminsky@nanoscopy.ru
ORCID iD: 0000-0001-8731-3947

Physical Department, Doct. of Sci. (Physics and Mathematics), Prof., Director General

Russian Federation, Moscow; Moscow

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2. Fig.1. 3D image of the potato virus X. Resonance mode AFM

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3. Fig.2. Top: image of the graphite surface mounted on the measuring standard. The inclined stripe on the left side of the figure arises due to the working surface displacement of the standard by one nm. Resonance mode. Bottom: cross-section. The arrow indicates the step edge caused by the working surface displacement of the standard by 1 nm

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Copyright (c) 2025 Yaminsky D.I., Akhmetova A.I., Yaminsky I.V.