Tool Coatings Based on Tialn Produced by Middle-Frequency Pulsed Magnetron Spraying

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Abstract

The effect of pulse frequency during pulsed magnetron sputtering of a TiAlN coating on changes in the phase and elemental compositions of coatings, their microstructure, surface
roughness, and physical and mechanical properties is considered. The optimal value of the pulse frequency at which a coating is formed based on the highly dispersed wear-resistant h-Ti 3Al2N2 phase with a dense nanocrystalline structure, minimal surface roughness, high microhardness and elastic recovery is established.

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About the authors

T. O. Soshina

Пермский национальный исследовательский политехнический университет (Лысьвенский филиал)

Author for correspondence.
Email: journal@electronics.ru

кандидат технических наук, доцент 

Russian Federation

References

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Supplementary files

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2. Fig. 1. Diffractograms of TiAlN coatings formed at different pulse frequencies

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3. Fig. 2. Surface morphology of TiAlN coatings formed at pulse frequency: a - 20 kHz; b - 30 kHz

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4. Fig. 3. Microstructure of TiAlN coatings formed at pulse frequency: a - 20 kHz; b - 30 kHz

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5. Fig. 4. Surface topography of TiAlN coatings formed at pulse frequency: a - 20 kHz; b - 30 kHz

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