СТУПЕНИ МИКРОЭЛЕКТРОННОЙ ЛЕСТНИЦЫ Authors: Issue: No 1 (2023) Pages: 2-8 Section: Articles URL: https://journals.eco-vector.com/0233-3619/article/view/628154 DOI: https://doi.org/10.7868/S0233361923010019 ID: 628154 Cite item Full Text Open Access Access granted Subscription or Fee Access (Russian) Abstract About the authors References Supplementary files Statistics Keywords , About the authors References Supplementary files Supplementary Files Action 1. JATS XML Download