Email this article A methodology for development of thin-film systems with defined gas sensitivity requiring no power sources and intended for chemoresistive gas sensing
- Authors: Tyunterov E.S.1, Abrukov V.S.1, Mukin V.A.1, Smirnov A.V.1, Petrov D.V.1, Petrov N.I.1, Aleksandrova N.V.1, Semenova I.Y.1
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Affiliations:
- The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
- Issue: Vol 16, No 1 (2023)
- Pages: 22-28
- Section: Nanotechnologies
- URL: https://journals.eco-vector.com/1993-8578/article/view/626861
- DOI: https://doi.org/10.22184/1993-8578.2022.16.1.22.28
- ID: 626861
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Abstract
A methodology for development of thin-film systems is presented, which will make it possible to obtain chemoresistive sensors with a given gas sensitivity. The methodology provides for conducting a series of experiments on the thin-film systems synthesis using various synthesis technologies (different starting materials, parameters of thin films synthesis, various methods of thin films synthesis: thermoresistive evaporation, air-drop sputtering, annealing in oxygen atmosphere), measuring their properties and characteristics, creating a database of experimental results; generalization of the dependencies contained in the experimental data using artificial neural networks in the form of multifactorial computational models. These models will make it possible to solve direct and inverse problems, extrapolate the dependencies revealed in the experimental data, and conduct virtual experiments.
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About the authors
E. S. Tyunterov
The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
Email: fizteh21@yandex.ru
ORCID iD: 0000-0002-8816-9737
Post Graduate
Russian Federation, CheboksaryV. S. Abrukov
The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
Email: fizteh21@yandex.ru
ORCID iD: 0000-0002-4680-6224
Doct. of Sci. (Physics and Mathematics), Head of the Department, Prof.
Russian Federation, CheboksaryV. A. Mukin
The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
Email: fizteh21@yandex.ru
ORCID iD: 0000-0002-9147-3799
Cand. of Sci. (Physics and Mathematics), Associate Professor
Russian Federation, CheboksaryA. V. Smirnov
The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
Author for correspondence.
Email: fizteh21@yandex.ru
ORCID iD: 0000-0003-2424-8142
Engineer
Russian Federation, CheboksaryD. V. Petrov
The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
Email: fizteh21@yandex.ru
ORCID iD: 0000-0001-8697-257X
Post Graduate
Russian Federation, CheboksaryN. I. Petrov
The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
Email: fizteh21@yandex.ru
ORCID iD: 0000-0002-3790-6661
Cand. of Sci. (Physics and Mathematics), Docent
Russian Federation, CheboksaryN. V. Aleksandrova
The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
Email: fizteh21@yandex.ru
ORCID iD: 0000-0002-7145-3010
Cand. of Sci. (Law), Associate Professor
Russian Federation, CheboksaryI. Y. Semenova
The Federal State Educational Establishment of Higher Professional Education "The Chuvash state university named after I. N. Ulyanov"
Email: fizteh21@yandex.ru
Senoir Researcher
Russian Federation, CheboksaryReferences
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