Synthesis and study of electrical conductivity of copper films obtained by copper oxide reduction by cathodic sputtering in hydrogen atmosphere for preparing of film electrodes with variable capacities

The peculiarities of copper films synthesis by cathode sputtering are considered. These films were oxidized and further reduced the oxide films back to the metal phase. The reduction was carried out by bombardment with copper atoms in a hydrogen atmosphere. This method of copper metal films producing provides better electrical conductivity. Surface resistivity was measured using the four-probe method. UV-vis transmission and absorption spectra have been studied. Practical applications of the identified dependencies are proposed.