Study of possibility of flexible variable vessels for remote pressure measurement systems

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Abstract

The technology of silicon deposition has been developed, and it has been possible to obtain a durable polycrystalline silicon film with good adhesion on a PET substrate with a thickness of 150...200 nm. Using this technology, a prototype of a flexible variable capacitance was prepared. The study of capacitance changes due to changes in pressure acting on it has a linear form, which makes it possible to use this technology for the manufacture of a pressure sensor.

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About the authors

A. A. Terentyev

Chuvash State University named after I.N.Ulyanov

Email: fizteh21@yandex.ru
ORCID iD: 0000-0001-8571-2020

Head of laboratory

Russian Federation, Cheboksary

A. V. Smirnov

Chuvash State University named after I.N.Ulyanov

Author for correspondence.
Email: fizteh21@yandex.ru
ORCID iD: 0000-0003-2424-8142

Engineer

Russian Federation, Cheboksary

References

  1. Sircar A., Kumar H. An introduction to flexible electronics: Manufacturing techniques, types and future. Journal of Physics Conference Series 1913(1):012047. https://doi.org/10.1088/1742-6596/1913/1/012047
  2. Park K.K., Khuri-Yakub B.T. et al., Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding, Journal of Microelectromechanical Systems, 2011. Vol. 20. No. 1. PP. 95–103.

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2. Fig.1. Typical examples of various electronic circuits

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3. Fig.2. Polycrystalline silicon nanoscale film on the surface of metallised PET

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4. Fig.3. Structural part of the sensor on the slice

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5. Fig.4. Silicon film

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6. Fig.5. Design of the sensor of the remote control system of pressure in car tyres. 1 – flexible sensor base; 2 – adhesive sealant; 3 – upper capacitor lining; 4 – lower capacitor lining; 5 – membranes; 6 – dielectric material

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7. Fig.6. Mock-up of a pressure sensor assembly

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8. Fig.7. Sensor test results

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Copyright (c) 2024 Terentyev A.A., Smirnov A.V.