Email this article Study of possibility of flexible variable vessels for remote pressure measurement systems
- Authors: Terentyev A.A.1, Smirnov A.V.1
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Affiliations:
- Chuvash State University named after I.N.Ulyanov
- Issue: Vol 17, No 2 (2024)
- Pages: 106-112
- Section: Nanotechnologies
- URL: https://journals.eco-vector.com/1993-8578/article/view/640874
- DOI: https://doi.org/10.22184/1993-8578.2024.17.2.106.112
- ID: 640874
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Abstract
The technology of silicon deposition has been developed, and it has been possible to obtain a durable polycrystalline silicon film with good adhesion on a PET substrate with a thickness of 150...200 nm. Using this technology, a prototype of a flexible variable capacitance was prepared. The study of capacitance changes due to changes in pressure acting on it has a linear form, which makes it possible to use this technology for the manufacture of a pressure sensor.
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About the authors
A. A. Terentyev
Chuvash State University named after I.N.Ulyanov
Email: fizteh21@yandex.ru
ORCID iD: 0000-0001-8571-2020
Head of laboratory
Russian Federation, CheboksaryA. V. Smirnov
Chuvash State University named after I.N.Ulyanov
Author for correspondence.
Email: fizteh21@yandex.ru
ORCID iD: 0000-0003-2424-8142
Engineer
Russian Federation, CheboksaryReferences
- Sircar A., Kumar H. An introduction to flexible electronics: Manufacturing techniques, types and future. Journal of Physics Conference Series 1913(1):012047. https://doi.org/10.1088/1742-6596/1913/1/012047
- Park K.K., Khuri-Yakub B.T. et al., Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding, Journal of Microelectromechanical Systems, 2011. Vol. 20. No. 1. PP. 95–103.
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