Email this article Precision delivery of liquid reagents to technological equipment based on a liquid flow regulator
- Authors: Sazhnev S.V.1, Kniazev V.I.1
-
Affiliations:
- LLC "Eltochpribor"
- Issue: Vol 18, No 2 (2025)
- Pages: 110-113
- Section: Equipment for Nanoindustry
- URL: https://journals.eco-vector.com/1993-8578/article/view/678953
- DOI: https://doi.org/10.22184/1993-8578.2025.18.2.110.113
- ID: 678953
Cite item
Open Access
Access granted
Abstract
A design of a liquid flow controller (LFC) for supplying liquid reagents to technological equipment using a differential pressure sensor is proposed. The results of LFC tests for regulating the liquid flow are presented. The possibility of regulating the liquid supply in the milliliter range with a relative error of less than 3% is demonstrated.
Full Text
About the authors
S. V. Sazhnev
LLC "Eltochpribor"
Author for correspondence.
Email: sazhnev@eltochpribor.ru
ORCID iD: 0009-0009-8537-8291
Cand. of Sci. (Tech), Director General
Russian Federation, ZelenogradV. I. Kniazev
LLC "Eltochpribor"
Email: sazhnev@eltochpribor.ru
ORCID iD: 0009-0008-4848-2375
Cand. of Sci. (Physics and Mathematics)
Russian Federation, ZelenogradReferences
- Сажнев С.В., Князев В.И. Прецизионная подача газов в вакуумный реактор технологического оборудования с термокоррекцией внешней среды. Вакуумная наука и техника. Материалы ХХVII научно-технической конференции с участием зарубежных специалистов Крым – Москва, 2020. С. 123–128.
- Кремлевский П.П. Расходомеры и счетчики количества: Справочник. 4-е изд., перераб. и доп. Л.: Машиностроение. Ленингр. отделение, 1989.
- Ландау Л.Д., Лифшиц Е.М. Гидродинамика. Теоретическая физика: Т. 7. 3-е изд., перераб. М.: Наука, 1986.
Supplementary files
