Author Details
Gusev, E. E.
| Issue | Section | Title | File |
| Vol 17, No 6 (2024) | Equipment for Nanoindustry | Assessment of coating thickness effect on the amount of residual mechanical stresses in Al2O3/Si | |
| Vol 18, No 2 (2025) | Nanotechnologies | Assessment of the influence of ion treatment on the value of residual mechanical stresses in Al2O3/Si |