Determination of the Ion—Solid Interaction Potential from the Experiment and Its Influence on the Profiles of Implanted Particles

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Abstract

Based on the analysis of the angular distributions of particles passing through thin gold films, the parameters of the potential that best describes the experiment are obtained. The resulting potential differs from the potential describing collisions in the gaseous phase by a noticeable change in the screening constant. The influence of the collision energy, the choice of potential, and the model of electron bremsstrahlung on the depth distribution of implanted particles is analyzed.

About the authors

A. N. Zinoviev

Ioffe Institute of Physics and Technical Sciences

Author for correspondence.
Email: zinoviev@inprof.ioffe.ru
Russian Federation, Saint Petersburg

P. Yu. Babenko

Ioffe Institute of Physics and Technical Sciences

Email: zinoviev@inprof.ioffe.ru
Russian Federation, Saint Petersburg

V. S. Mikhailov

Ioffe Institute of Physics and Technical Sciences

Email: zinoviev@inprof.ioffe.ru
Russian Federation, Saint Petersburg

D. S. Tensin

Ioffe Institute of Physics and Technical Sciences

Email: zinoviev@inprof.ioffe.ru
Russian Federation, Saint Petersburg

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