Email this article 60 years in microelectronics
- Authors: Kovalevsky Y.
- Issue: No 3 (2024)
- Pages: 86-94
- Section: Report From A Company
- URL: https://journals.eco-vector.com/1992-4178/article/view/631700
- DOI: https://doi.org/10.22184/1992-4178.2024.234.3.86.94
- ID: 631700
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Abstract
На этом сложный и длительный процесс кристального производства заканчивается.
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About the authors
Yu. Kovalevsky
Author for correspondence.
Email: journal@electronics.ru
Russian Federation
Supplementary files
Supplementary Files
Action
1.
JATS XML
2.
Andrei Buinevich
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3.
Silicon wafers in production
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4.
In the photolithography section
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5.
Photolithography, plasma chemical etching and appearance control area
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6.
Vacuum spraying machines
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7.
Photoresist stripping equipment
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8.
Measuring and control equipment
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9.
Final control
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