Email this article How to create a clean production room. Technologies and equipment
- Authors: Usatov A.1, Lyakhov P.2
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Affiliations:
- АНО «АВТех»
- ООО «Инпрен»
- Issue: No 3 (234) (2024)
- Pages: 216-222
- Section: Production engineering and management
- URL: https://journals.eco-vector.com/1992-4178/article/view/631764
- DOI: https://doi.org/10.22184/1992-4178.2024.234.3.216.222
- ID: 631764
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Abstract
Clean rooms in electronics industry play a key role in ensuring high quality products. The article reviews technological solutions and equipment when creating clean rooms and local clean zones in high-tech industries.
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About the authors
A. Usatov
АНО «АВТех»
Author for correspondence.
Email: service@awtec.ru
к.х.н.
Russian FederationP. Lyakhov
ООО «Инпрен»
Email: journal@electronics.ru
Russian Federation
Supplementary files
Supplementary Files
Action
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JATS XML
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Fig. 1. Station with vertical downward air flow in the working area "Kvazar" (modifications with working area width of 1 600 and 1 200 mm, transparent and black matte walls)
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Fig. 2. Mobile clean module "Soyuz"
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Fig. 3. Modular construction "Mars-1" equipped with filter-ventilation module "FVM" to create clean zones with controlled environment
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Fig. 4. Airlock with side blowing "Portal"
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Fig. 5. Mobile cabinet-trolley for transportation of clean products with HEPA-filtered air in the working area
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Fig. 6. KS transfer windows for clean rooms
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