Mems rf / microwave switches. Part 2

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Abstract

The article considers the MEMS switches for RF/microwave signals and provides information on the features and characteristics of Analog Devices MEMS switches.

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About the authors

V. Kochemasov

ООО «Радиокомп»

Author for correspondence.
Email: vkochemasov@radiocomp.ru

генеральный директор, кандидат технических наук

Russian Federation

E. Torina

ООО «Радиокомп»

Email: drozdovaym@mpei.ru

кандидат технических наук, доктор физико-математических наук, доцент

Russian Federation

A. Safin

ИРЭ им. В.А. Котельникова РАН

Email: asafin@gmail.com

ведущий научный сотрудник

Russian Federation

References

  1. Uvarov I.V. Migration of adhesive material in electrostatically actuated MEMS switch // Microelectronics Reliability. 2021. V. 125.
  2. https://www.analog.com/en/technical-articles/fundamentals-adi-revolutionary-mems-switch-technology.html
  3. Carty E., Fitzgerald P., Mc Daid P. The Fundamentals of Analog Devices Revolutionary MEMS Switch Technology. Technical article. / analog.com. 4 p.
  4. Data sheet на переключатели ADGM1001/ADGM1002/ADGM1003 [https://www.analog.com/media/en/technical-documentation/data-sheets/adgm1001-1002-1003.pdf].
  5. Data sheet на переключатели ADGM1004 [https:// www.analog.com/media/en/technical-documentation/ data-sheets/adgm1004.pdf].
  6. Data sheet на переключатели ADGM1304 [https:// analog.com/media/en/technical-documentation/data-sheets/adgm1304.pdf].
  7. Data sheet на переключатели ADGM1144 [https:// www.analog.com/media/en/technical-documentation/ data-sheets/adgm1144.pdf].

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Copyright (c) 2024 Kochemasov V., Torina E., Safin A.