Development of a Hall effect sensor based on a SOI MOSFET with voltage control

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Abstract

The article presents a SOI MOSFET Hall effect sensor developed at ZNTC JSC. An experimental integrated circuit for non-contact magnetic field sensing with a linear analog output was designed and tested. The obtained characteristics of the device demonstrate its applicability in various technical fields requiring precise measurements and control.

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About the authors

E. Litvinenko

АО «ЗНТЦ»

Author for correspondence.
Email: elitvinenko@zntc.ru

ведущий инженер Дизайн-центра СБИС

Russian Federation, Солнечная аллея, дом 6, Зеленоград, г. Москва, 124527

V. Polevikov

АО «ЗНТЦ»

Email: polevikov@zntc.ru

к.т.н., руководитель Дизайн-центра СБИС

Russian Federation, Солнечная аллея, дом 6, Зеленоград, г. Москва, 124527

A. Krasyukov

НИУ «МИЭТ»

Email: a_kras@org.miet.ru

к.т.н., доцент

Russian Federation, пл. Шокина, 1, Зеленоград, г. Москва, 124498

Supplementary files

Supplementary Files
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1. JATS XML
2. Fig. 1. A three-dimensional model of a Hall sensor based on CNI MOPT. The shutter is not shown

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3. Fig. 2. Circuit diagram of the Hall element with voltage control

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4. Fig. 3. Hall voltage dependences on the magnetic field at different drain-source voltages (VH2) at gate voltage VG = 0 V

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5. Fig. 4. Hall voltage dependences on the magnetic field at different drain-source voltages (VH2) at gate voltage VG = 1 B

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6. Fig. 5. Hall voltage dependences on the magnetic field at different drain-source voltages (VH2) at gate voltage VG = 2 B

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7. Fig. 6. Hall voltage dependences on the magnetic field at different drain-source voltages (VH2) at gate voltage VG = 3...5 B

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8. Fig. 7. Hall voltage dependences on the magnetic field at different voltages VG; VH2 = 0.5 V

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9. 8. Hall voltage dependences on the magnetic field at different voltages VG; VH2 = 1 V

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10. Fig. 9. Hall voltage dependences on the magnetic field at different voltages VG; VH2 = 1.5 V

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11. Fig. 10. Updated circuit for switching on the Hall element with voltage control

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12. Fig. 11. The family of transmission characteristics of Hall sensors at IB = 150 µA and VG = 5 V

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13. Fig. 12. The diagram of the output voltage change reduced to zero (the initial offset is subtracted) depending on the magnitude of the magnetic induction (magnetic field) for different currents through the sensor at VG = 5 V

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14. Fig. 13. Zero offset of UOFFSET samples at current through sensor IB = 150 Ma and VG = 5 V

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15. Fig. 14. Family of transfer characteristics of microcircuits

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16. Fig. 15. Sensitivity of the developed microcircuits

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17. Fig. 16. Comparison of the measured and ideal transfer output signal of the sample No. 1 microcircuit

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18. Fig. 17. The coefficient of nonlinearity of microcircuits

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Copyright (c) 2025 Litvinenko E., Polevikov V., Krasyukov A.