Thin metal oxide films for flexible and stretchable electronic devices

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Abstract

The article discusses methods for synthesizing metal oxide films and sensors based on them on flexible and stretchable polymer substrates. Their advantages and disadvantages, applications and implementation prospects are shown.

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About the authors

M. Belykh

Воронежский государственный технический университет

Author for correspondence.
Email: belykh.maks@yandex.ru

аспирант кафедры твердотельной электроники

Russian Federation, Воронеж

D. Permyakov

Воронежский государственный технический университет

Email: Dima.P.S@yandex.ru

аспирант кафедры твердотельной электроники

Russian Federation, Воронеж

A. Strogonov

Воронежский государственный технический университет

Email: andreistrogonov@mail.ru

д.т.н., профессор кафедры твердотельной электроники

Russian Federation, Воронеж

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Supplementary files

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2. Fig. 1. Application of metal oxide films on flexible and stretchable substrates

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3. Fig. 2. Example of the design of an external stretching structure for thin films of metal oxides

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4. Fig. 3. Design of a transistor made on a wavy structure

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5. Fig. 4. Serpentine structure

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6. Fig. 5. Lamellar structure of the oxide film surface in ITO-PDMS samples after multiple stretching cycles

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7. Fig. 6. Flexible film based on nickel oxide nanoparticles

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8. Fig. 7. ZnO nanowires synthesized by hydrothermal method

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Copyright (c) 2025 Belykh M., Permyakov D., Strogonov A.