Email this article High-frequency capacitors manufactured using MEMS Technology
- Authors: Kochemasov V.1, Gorbachev V.1, Khorev S.1
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Affiliations:
- ООО «Радиокомп»
- Issue: No 6 (2025)
- Pages: 116-125
- Section: Micro and nanostructures
- URL: https://journals.eco-vector.com/1992-4178/article/view/688721
- DOI: https://doi.org/10.22184/1992-4178.2025.247.6.116.124
- ID: 688721
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Abstract
The article provides an overview of the main technologies used to manufacture microelectromechanical systems (MEMS). It examines the design features of MEMS capacitors and their operating principles, and provides examples of devices based on them.
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About the authors
V. Kochemasov
ООО «Радиокомп»
Author for correspondence.
Email: vkochemasov@radiocomp.ru
генеральный директор
Russian FederationV. Gorbachev
ООО «Радиокомп»
Email: vkochemasov@radiocomp.ru
инженер
Russian FederationS. Khorev
ООО «Радиокомп»
Email: vkochemasov@radiocomp.ru
инженер
Russian FederationReferences
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Supplementary files
Supplementary Files
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JATS XML
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Fig. 1. Pressure sensor using MEMS capacitors
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Fig. 2. MEMS capacitor-tunable polysilicon resonator
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Fig. 3. Fractal capacitors of the 3rd, 4th and 5th orders (a, b, c) and the dependences of their capacitance (d) and quality factor (d) on frequency
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Fig. 4. MEMS capacitors with flat plates [4]
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Fig. 5. MEMS microphones based on variable capacitors
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Fig. 6. Dependence of the change in capacitance (microphone sensitivity) on the membrane material
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Fig. 7. Variable MEMS capacitor with a rotating plate: a - structure of the outer movable plate, b - section of the movable plate, c - finished variable capacitor
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Fig. 8. Rotary variable capacitor developed at UCLA: a – capacitor layout, b – photograph of the finished capacitor, c – dependence of the capacitor capacitance on the control voltage: the upper line corresponds to plates 25 μm thick and 425 μm long; the lower line corresponds to plates 25 μm thick and 200 μm long
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Fig. 9. Variable MEMS capacitor with triangular plates: a – capacitor layout, b – dependence of the capacitor capacitance on the main control voltage
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Fig. 10. Changing the capacitance of a capacitor using a dielectric layer
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Fig. 11. Characteristics and design options of variable MEMS capacitors
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Fig. 12. Switching MEMS capacitor
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Fig. 13. Assembly of MEMS switch capacitors
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Fig. 14. MEMS fishbone capacitor
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Fig. 15. MEMS capacitor of the "fishbone" type of three elements and its characteristics [11]
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