Email this article Development of micromechanical linear acceleration sensors and their serial industrial engineering
- Authors: Zhukova S.A.1, Obizhaev D.Y.1, Ulyanov S.A.1, Zinoviev M.A.1, Riskin D.D.1, Suzdaltsev S.Y.1, Frolov E.N.1, Gantseva Y.A.1
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Affiliations:
- SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
- Issue: Vol 17, No 5 (2024)
- Pages: 282-290
- Section: Equipment for Nanoindustry
- URL: https://journals.eco-vector.com/1993-8578/article/view/635265
- DOI: https://doi.org/10.22184/993-8578.2024.17.5.282.290
- ID: 635265
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Abstract
In SRC RF FSUE "Central Research Institute of Chemistry and Mechanics" has been developed a line of micromechanical linear acceleration sensors. The line includes sensors of three versions MMA-2, MMA-10 and MMA-30 with conversion ranges of ±20 m/s², ±100 m/s² and ±300 m/s² respectively. The sensors are intended for use as part of orientation, stabilisation and navigation systems in various products. The full range of tests confirming the declared technical characteristics and resistance to external influences has been carried out, and the operating design documentation for serial industrial engineering has been approved. The planned production value of these sensors is several thousand pieces per year.
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About the authors
S. A. Zhukova
SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
Author for correspondence.
Email: szh17@yandex.ru
ORCID iD: 0009-0004-1566-8182
Cand.of Sci. (Tech), Deputy Director
Russian Federation, MoscowD. Yu. Obizhaev
SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
Email: szh17@yandex.ru
ORCID iD: 0009-0001-4437-558X
Cand.of Sci. (Tech), Head of Department
Russian Federation, MoscowS. A. Ulyanov
SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
Email: szh17@yandex.ru
ORCID iD: 0009-0002-7308-6063
Head of SRC of Nanotechnology
Russian Federation, MoscowM. A. Zinoviev
SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
Email: szh17@yandex.ru
ORCID iD: 0009-0000-3322-317X
Head of Laboratory
Russian Federation, MoscowD. D. Riskin
SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
Email: szh17@yandex.ru
ORCID iD: 0009-0006-6164-1284
Leading Engineer
Russian Federation, MoscowS. Yu. Suzdaltsev
SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
Email: szh17@yandex.ru
ORCID iD: 0009-0001-0224-619X
Cand.of Sci. (Tech), Head of Department
Russian Federation, MoscowE. N. Frolov
SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
Email: szh17@yandex.ru
ORCID iD: 0009-0002-1802-373X
Cand.of Sci. (Tech), Head of Laboratory
Russian Federation, MoscowYu. A. Gantseva
SRC RF FSUE "Central Research Institute of Chemistry and Mechanics"
Email: szh17@yandex.ru
ORCID iD: 0009-0006-9899-4972
Head of Laboratory
Russian Federation, MoscowReferences
- US5006487A. Method of making an electrostatic silicon accelerometer. Honeywell Inc., Minneapolis, Minn. (US). H01L 21/302. 09.04.1991.
- US5551294A. Micromachined measuring cell with arm supported sensor. CSEM-Centre Suisse D’Electronique et de Microtechnique, Neuchatel (Switzerland). H01L 21/00. 27.01.1995.
- US5352918A Capacitive micro-sensor with a low stray capacity and manufacturing method. Sextant Avionique, Cedex, (France). H01L 29/84 H01L 29/96. 04.10.1994. 16.02.1993.
- EP0937985B1 A method of producing an acceleration sensor. Panasonic Holdings Corp. (JP) G01P 15/12. G01P 15/125. G01P 15/08. G01P 15/09. H01L 29/84. 07.09.1998.
- Marjoux D., Ullah P., Frantz-Rodriguez N., Morgado-Orsini P.F., Soursou M., Brisson R., Lenoir Y., Delhaye F. Silicon MEMS by Safran-Navigation grade accelerometer ready for mass production. In Proceedings of the 2020 DGON Inertial Sensors and Systems (ISS), Braunschweig, Germany, 15–16 September 2020.
- Способ изготовления упругого элемента микромеханического устройства/ RU2580910C1. Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт химии и механики" (ФГУП "ЦНИИХМ") (RU). H01L 21/308 10.04.2016.
- Микромеханический датчик линейных ускорений. ММА-2, ММА-10, ММА-30. Технические условия. ВШДИ.402131.002 ТУ, 84 с.
- Микромеханический датчик линейных ускорений. ММА-2, ММА-10, ММА-30. Руководство по эксплуатации. ВШДИ.402131.002 РЭ, 25 с.
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