Email this article Experience in the Creation and Implementation of complex industry vacuum systems (based on devices and component parts eliminating movement friction and designed to work in the field of micro-and nano-electronics and other high-tech)
- Authors: Vasin VA1
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Affiliations:
- Moscow State Institute of Electronics and Mathematics
- Issue: Vol 2, No 1 (2008)
- Pages: 212-229
- Section: Articles
- URL: https://journals.eco-vector.com/2074-0530/article/view/69742
- DOI: https://doi.org/10.17816/2074-0530-69742
- ID: 69742
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Abstract
The article is devoted to creation of executive and switch complexes of vacuum technological equipment and contains the review of both the most widespread and the most prospective devices based on the principle of controlled elastic deformation.
About the authors
V A Vasin
Moscow State Institute of Electronics and Mathematicsк.т.н., доц8-495-223-05-23 доб. 13-64; МИЭМ (ту); Moscow State Institute of Electronics and Mathematics
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