Investigation of Thin Films MgAl2O4, Deposited on the Si Substrates by Vacuum Thermal Evaporation

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Abstract

The article presents data on the study of X-ray structural and microstructural characteristics of thin films of aluminum-magnesium spinel MgAl2O4 deposited on Si substrates by vacuum thermal evaporation. MgAl2O4 films have a polycrystalline rhombic structure. The values of the unit cell parameters of MgAl2O4 are calculated. Scanning electron and atomic force microscopy showed that MgAl2O4 films have a densely packed structure without cracks. Physical characteristics and good adhesion of MgAl2O4 thin films to silicon substrates indicate their possibility of using in devices of opto- and microelectronics.

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About the authors

Aliona V. Stanchik

State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”

Email: alena.stanchik@bk.ru
Cand. Sci. (Phys.-Math.); senior researcher at the Laboratory of Semiconductor Physics Minsk, Republic of Belarus

Valery F. Gremenok

State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”

Email: gremenok@physics.by
Dr. Sci. (Phys.-Math.); Head at the Laboratory of Semiconductor Physics Minsk, Republic of Belarus

Ekaterina L. Trukhanova

State Scientific and Production Association “Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus”

Email: katu-shkak@mail.ru
Cand. Sci. (Phys.-Math.); senior researcher at the Laboratory of Technology and Physics of Crystal Growth Minsk, Republic of Belarus

Vital V. Khoroshko

Belarusian State University of Informatics and Radioelectronics

Email: khoroshko@bsuir.by
Cand. Sci. (Eng.); Head at the Department of Information and Computer Systems Design Minsk, Republic of Belarus

Sultan X. Suleymanov

Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan

Email: sultan.suleimanov@gmail.com
Cand. Sci. (Phys.-Math.); Head at the Laboratory of High-Temperature Composite Materials and Coatings Tashkent, Uzbekistan

Valery G. Dyskin

Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan

Email: dyskin@uzsci.net
Cand. Sci. (Eng.); senior research at the Laboratory of High-Temperature Composite Materials and Coatings Tashkent, Uzbekistan

Mustafa U. Djanklich

Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan

Email: mustafa.djanklich@gmail.com
Cand. Sci. (Eng.); senior research at the Laboratory of High-Temperature Composite Materials and Coatings Tashkent, Uzbekistan

Natalya A. Kulagina

Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan

Email: nataly.kulagina@gmail.com
research at the Laboratory of High-Temperature Composite Materials and Coatings Tashkent, Uzbekistan

Shakhboz Yo. ugli Amirov

Institute of Materials Science of the SPA “Physics-Sun” of the Academy of Sciences of the Republic of Uzbekistan

Email: amirov_shaxboz@mail.ru
research at the Laboratory of High-Temperature Composite Materials and Coatings Tashkent, Uzbekistan

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