Study of Influence of Ion-Beam Deposition Process Parameters on the Structure and Composition of Diamond-Like Films

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Abstract

In this work, the influence of ion-beam deposition parameters as well as precursor composition on the structure of the formed carbon film has been studied.

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About the authors

С. A. Yeremin

АО «ВНИИИнструмент»

Author for correspondence.
Email: magazine@technosphera.ru

кандидат технических наук, ведущий инженер

Russian Federation

E. A. Mitrofanov

АО «ВНИИАлмаз»

Email: magazine@technosphera.ru

кандидат технических наук, научный сотрудник

Russian Federation

O. Yu. Kudryashov

АО «ВНИИИнструмент»

Email: magazine@technosphera.ru

заведующий лабораторией

Russian Federation

V. N. Anikin

ФГБУ ВНИИТС

Email: magazine@technosphera.ru

кандидат технических наук, заведующий научно-технологическим центром

Russian Federation

A. M. Kolesnikova

ФГБУ ВНИИТС

Email: magazine@technosphera.ru

инженер

Russian Federation

V. V. Levina

НИТУ МИСиС

Email: magazine@technosphera.ru

доктор технических наук, профессор

Russian Federation

A. I. Lukashin

АО «ВНИИИнструмент»

Email: magazine@technosphera.ru

начальник управления производства

Russian Federation

References

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  13. Wang C., Sui X., Lu X. and et.al. Friction and wear of a-C : H films deposited at different bias in air and NaCl solution. Tribology International. 2022. Vol. 175. 107863.
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2. Fig.1. Scheme of the experiment

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3. Fig.2. SEM images of the surface of carbon films; a – image of the coating obtained from cyclohexane at a current of 150 mA 2 × 10−2 Pa; b – image of a coating obtained from cyclohexane at a current of 350 mA at a pressure of 2 × 10–2 Pa; c – image of a coating obtained from acetone at a current of 350 mA at a pressure of 2 × 10–2 Pa; d – image of the coating obtained at a pressure of 2 10–1 Pa

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4. Fig.3. Raman spectra: a – spectrum from a coating obtained from cyclohexane at a current of 150 mA and a pressure of 2 × 10–2 Pa; b – spectrum from a coating obtained from cyclohexane at a current of 350 mA and a pressure of 2 × 10–2 Pa; c – spectrum from a coating obtained from acetone at a current of 350 mA and a pressure of 2 × 10–2 Pa; d – spectrum from the coating obtained at a pressure of 2 × 10–1 Pa

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Copyright (c) 2023 Yeremin С.A., Mitrofanov E.A., Kudryashov O.Y., Anikin V.N., Kolesnikova A.M., Levina V.V., Lukashin A.I.

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