Отправить статью по E-mail Active metamaterial on the base of integral nems-structures
- Авторы: Khartov SV1
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Учреждения:
- Выпуск: Том 10, № 5 (2009)
- Страницы: 60-64
- Раздел: Статьи
- URL: https://journals.eco-vector.com/2712-8970/article/view/508572
- ID: 508572
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Аннотация
The conception of integrated nanoelectromechanical systems (NEMS) formation method is considered. The method is based on original combination of self-organizing and self-aligning processes. The functionality of proposed NEMS-structures and possible applications of nanomaterial which constituted by two-dimensional array of such structures are discussed. The results of experiments directed to proposed NEMS-technology realization are led.
Список литературы
- Nevolin, V . K. The probe nanotechnology in electronics / V. K. Nevolin. M. : Technosfera, 2006. (in Russian)
- Bobrinetskij, I. I. Development of the approaches to the bulk production of carbon nanotube based functional structures /I. I. Bobrinetskij, M. M. Simunin, S. V Khartov et al. // The thesis of the conf. "Actual problems of semiconductor microelectronics X STC". Taganrog. TRTU. 2006. Part 2. P. 6-8. (inRussian)
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