Author Details
Izyumov, M. O.
Issue | Section | Title | File |
Vol 54, No 3 (2025) | TECHNOLOGIES | Nanostructured ruthenium etching in three-component Cl2 /O2/Ar plasma | |
Vol 54, No 3 (2025) | TECHNOLOGIES | Self-assembly of 3D mesostructures using local ion-plasma treatment |