Every atom counts: the use of high-purity gases in the microelectronics industry

S. Dubyaga; Дубяга С.; I. Kozyrev; Козырев И.

doi:10.22184/1992-4178.2024.238.7.190.191

Every atom counts: the use of high-purity gases in the microelectronics industry

作者: Dubyaga S.¹, Kozyrev I.¹
隶属关系:
1. ООО «Фирма «ХОРСТ»
期: 编号 7 (2024)
页面: 190-191
栏目: Manufacturing equipment and process materials
URL: https://journals.eco-vector.com/1992-4178/article/view/636204
DOI: https://doi.org/10.22184/1992-4178.2024.238.7.190.191
ID: 636204

如何引用文章

全文:

开放存取

##reader.subscriptionAccessGranted##
受限制的访问

订阅或者付费存取

详细
全文:
作者简介
参考
补充文件
统计

详细

HORST LLC is the main supplier of high-purity gases for the microelectronics industry of Russia and Belarus, having its own production facilities. The article discusses the features of technologies for the production and deep purification of gases used in the production of semiconductor materials.