Email this article MEMS RF / microwave switches. Part 3
- Authors: Kochemasov V.1, Torina E.2, Safin A.3
-
Affiliations:
- ООО «Радиокомп»
- НИУ «МЭИ»
- ИРЭ им. В.А. Котельникова РАН
- Issue: No 6 (237) (2024)
- Pages: 88-97
- Section: Microwave electronics
- URL: https://journals.eco-vector.com/1992-4178/article/view/636245
- DOI: https://doi.org/10.22184/1992-4178.2024.237.6.88.97
- ID: 636245
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Abstract
The article considers the MEMS switches for RF / microwave signals and provides information on the features and characteristics of Menlo Micro MEMS switches.
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About the authors
V. Kochemasov
ООО «Радиокомп»
Author for correspondence.
Email: vkochemasov@radiocomp.ru
к.т.н., генеральный директор
Russian FederationE. Torina
НИУ «МЭИ»
Email: drozdovaym@mpei.ru
к.т.н., доцент
Russian FederationA. Safin
ИРЭ им. В.А. Котельникова РАН
Email: asafin@gmail.com
д.ф.-м-н., в.н.с.
Russian FederationReferences
- Happich J. MEMS power switches to shrink thanks to through glass via packaging. // https://www.eenewseurope.com/en/mems-power-switches-to-shrink-thanks-to-through-glass-via-packaging/ [Электронный ресурс. Дата обращения 21.03.2024]
- Happich J. GE spins out MEMS startup: wants cheaper power switches // Electronic Engineering Times Europe. January 2017. PP. 12–13.
- Micro-mechanical switches for both power and 5G applications. www.Mwee.com, www.menlomicro.com, www.corning.com.
- Leitner J. RF MEMS Switch Performance in Extreme Environments. // Microwave Journal. 2021. No. 12. PP. 54–60.
- Data sheet на переключатели MM7100 [https://menlomicro.com/images/general/MM7100_Datasheet.pdf].
- Data sheet на переключатели MM1200 [https://menlomicro.com/images/general/MM1200_Datasheet.pdf].
- Data sheet на переключатели MM1300 [https://menlomicro.com/images/general/MM1300_Datasheet.pdf].
- Data sheet на переключатели MM5130 [https://menlomicro.com/images/general/MM5130_Datasheet.pdf].
- Data sheet на переключатели MM5120 [https://menlomicro.com/images/general/MM5120_Datasheet.pdf].
- Data sheet на переключатели MM5140 [https://menlomicro.com/images/general/MM5140_Datasheet.pdf].
- Data sheet на переключатели MM5600 [https://menlomicro.com/images/general/MM5600_Datasheet.pdf].
- Mirzajani H., Ilkhechi A.K., Zolfaghari P. et al. Power efficient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications // Microelectronics Journal. 2017. V. 69. PP. 64–72.
Supplementary files
Supplementary Files
Action
1.
JATS XML
2.
Fig. 29. Dependence of the gap size S on time for contacts made of gold and two types of Menlo Micro alloys: MM-0, MM-2. Ambient temperature 85 °C, ambient pressure 120 MPa
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3.
Fig. 30. Structural diagrams of multichannel SPST switches by Menlo Micro: a - 5-channel MEMS switch MM7100; b - 6-channel MEMS switches MM1200 and MM3100
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4.
Fig. 31. Debug boards developed by Menlo Micro for the manufactured switches: a - MM1200-EVK; b - MM3100EVK; c - MM5130EVK2
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5.
Fig. 32. Dependence of the maximum input power on frequency
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6.
Fig. 33. Dependence of the turn-on resistance of the MM3100 product on temperature
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7.
Fig. 34. Dependence of the probability of failures Po on the number of switching cycles in hot mode at different values of the input power
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8.
Fig. 35. Voltage diagrams: a - on the gate; b - input radio frequency signal
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9.
Fig. 36. Structural diagrams of SP4T MEMS switches from Menlo Micro: a - MM5130; b - MM5120, MM5140
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10.
Рис. 37. Зависимости развязки (а) и потерь (б) от частоты для разных портов изделия ММ5130 при температуре 25°С
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11.
Fig. 38. Dependence of insertion losses in MM5120 and MM5130 products on the number of switching cycles (at an ambient temperature of 20 ° C and an input signal power of 10 dBm)
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12.
Fig. 39. Dependences of the power of harmonic components of the signal on the ambient temperature at a frequency of 1 GHz in the MM5130 product: a - the second harmonic; b - the third harmonic
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13.
Fig. 40. Dependence of the main parameters of the MM5120 product on the frequency for different channels at a temperature of 25 °C: a - insertion loss; b - return loss; c - decoupling
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14.
Fig. 41. Dependence of the main parameters of the MM5120 product on the frequency for different temperatures: a - insertion loss; b - return loss; c - decoupling
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15.
Fig. 42. Dependences of the probability of failure Po for the MM5120 product at different temperature values: a - on time; b - on the number of cycles worked
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16.
Fig. 43. Structural diagram of the DPDT switch MM5600 from Menlo Micro
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17.
Fig. 44. Dependence of the main parameters of the MM5600 product on the frequency for different channels at a temperature of 25 °C: a - insertion loss; b - return loss; c - decoupling
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