Application of the Davidon – Fletcher – Powell method for finding the parameters of a specified concentration profile during ion implantation

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Abstract

The article is devoted to the application of the Davidon – Fletcher – Powell method for finding the minimum of the objective function in the calculation of concentration profile parameters during ion implantation. The developed program has demonstrated high efficiency in determining the optimal parameters, confirming the adequacy of the approach for solving the stated problem.

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P. Kuznetsov

АО «ГосНИИП»

Author for correspondence.
Email: ps_kuznetsov@mail.ru

к.т.н., заместитель начальника комплекса

Russian Federation, 129226, г. Москва, проспект Мира, 125

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2. Fig. 1. Schematic representation of a numerical model for implantation in multilayer structures

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3. Fig. 2. Block diagram of the Davidon–Fletcher–Powell optimization algorithm [18]

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