Bench-top automatic machine for gold wire mounting by ball-wedge method

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The article describes the bench-top automatic machine for thermosonic micro welding gold wire leads with a diameter of 17.5 to 50 μm featured an automatic system for the alignment of working tool with multi-level pads and a precision three-axis coordinate system based on servo drives. The machine provides automatic leads mounting according to the coordinates of the interconnection points previously stored in the memory.

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Sobre autores

I. Petukhov

ОАО «Планар-СО»

Autor responsável pela correspondência
Email: petuchov@kbtem.by

к. т. н., начальник научно-технического центра

Belarus

E. Letunovich

ОАО «Планар-СО»

Email: petuchov@kbtem.by

начальник лаборатории

Belarus

Bibliografia

  1. Достанко А. П. [др.]. Технологические процессы и системы в микроэлектронике: плазменные, электронно-ионно-лучевые, ультразвуковые. / Минск: Бестпринт, 2009. 202 с.
  2. Harmann G. G. Wire bonding in microelectronics. Third Edition. / N.Y.: McGraw Hill, 2010. 427 p.
  3. Abe H., Kang D. C., Yamamoto T., Yagihashi T., Endo Y., Saito H., Horie T., Tamate H., Ejiri Y., Watanabe N. and Iwasaki T. Cu wire and Pd-Cu wire package reliability and molding compounds, 2012. IEEE 62nd Electronic Components and Technology Conference, IEEE, San Diego, CA, pp. 1117–1123.
  4. Appelt B. K., Tseng A., Chen C.-H. and Lai Y.-S. Fine pitch copper wire bonding in high volume production, Microelectronics Reliability, Vol. 51. No. 1, 2011, pp. 13–20.
  5. https://www.hesse-mechatronics.com/en/
  6. https://www.kns.com/Products/Equipment/Ball-Bonder
  7. https://www.fkdelvotec.com/en/medien/downloads/
  8. https://www.asmpacific.com/en/products?equipment=4
  9. Петухов И. Б. Стабилизация сварочного усилия в процессе ультразвукового монтажа проволочных и ленточных выводов // Технологии и конструирование в электронной аппаратуре. 2021. № 1–2. С. 49–53.

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2. Fig.1. Microwelding methods: a – ball-wedge; b – wedge-wedge

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3. Fig.2. Position of the ultrasonic transducer at the connection position. Δh – difference in height of contact pads

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4. Fig.3. Single axis control system

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5. Fig.4. Block diagram of a PID controller along one coordinate axis: Kv – speed coefficient; Ka – acceleration coefficient; Kp – proportional coefficient; Kd – differential coefficient; Ki – integral coefficient; Kilimit – limitation of the integral coefficient; LPF – low pass filter

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6. Fig.5. Graphic settings of the PID controller along one coordinate axis: a – optimal setting of the PID controller; b – non-optimal setting of the PID controller (oscillations in the speed curve are visible)

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7. Fig.6. Welding head of the installation EM-6705-02

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8. Fig.7. High-voltage pulse shape for forming a ball at the end of a wire at an oscillogram scale of 1: 1000

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9. Fig.8. Appearance of formed balls on gold wire with a diameter of 30 microns

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10. Fig.9. Automatic installation of thermosonic microwelding EM-6705-02 produced by OJSC "Planar-SO" of the scientific and production holding of precision engineering "Planar"

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Declaração de direitos autorais © Petukhov I., Letunovich E., 2023