MEMS RF / microwave switches. Part 3

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详细

The article considers the MEMS switches for RF / microwave signals and provides information on the features and characteristics of Menlo Micro MEMS switches.

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作者简介

V. Kochemasov

ООО «Радиокомп»

编辑信件的主要联系方式.
Email: vkochemasov@radiocomp.ru

к.т.н., генеральный директор

俄罗斯联邦

E. Torina

НИУ «МЭИ»

Email: drozdovaym@mpei.ru

к.т.н., доцент

俄罗斯联邦

A. Safin

ИРЭ им. В.А. Котельникова РАН

Email: asafin@gmail.com

д.ф.-м-н., в.н.с.

俄罗斯联邦

参考

  1. Happich J. MEMS power switches to shrink thanks to through glass via packaging. // https://www.eenewseurope.com/en/mems-power-switches-to-shrink-thanks-to-through-glass-via-packaging/ [Электронный ресурс. Дата обращения 21.03.2024]
  2. Happich J. GE spins out MEMS startup: wants cheaper power switches // Electronic Engineering Times Europe. January 2017. PP. 12–13.
  3. Micro-mechanical switches for both power and 5G applications. www.Mwee.com, www.menlomicro.com, www.corning.com.
  4. Leitner J. RF MEMS Switch Performance in Extreme Environments. // Microwave Journal. 2021. No. 12. PP. 54–60.
  5. Data sheet на переключатели MM7100 [https://menlomicro.com/images/general/MM7100_Datasheet.pdf].
  6. Data sheet на переключатели MM1200 [https://menlomicro.com/images/general/MM1200_Datasheet.pdf].
  7. Data sheet на переключатели MM1300 [https://menlomicro.com/images/general/MM1300_Datasheet.pdf].
  8. Data sheet на переключатели MM5130 [https://menlomicro.com/images/general/MM5130_Datasheet.pdf].
  9. Data sheet на переключатели MM5120 [https://menlomicro.com/images/general/MM5120_Datasheet.pdf].
  10. Data sheet на переключатели MM5140 [https://menlomicro.com/images/general/MM5140_Datasheet.pdf].
  11. Data sheet на переключатели MM5600 [https://menlomicro.com/images/general/MM5600_Datasheet.pdf].
  12. Mirzajani H., Ilkhechi A.K., Zolfaghari P. et al. Power efficient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications // Microelectronics Journal. 2017. V. 69. PP. 64–72.

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2. Fig. 29. Dependence of the gap size S on time for contacts made of gold and two types of Menlo Micro alloys: MM-0, MM-2. Ambient temperature 85 °C, ambient pressure 120 MPa

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3. Fig. 30. Structural diagrams of multichannel SPST switches by Menlo Micro: a - 5-channel MEMS switch MM7100; b - 6-channel MEMS switches MM1200 and MM3100

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4. Fig. 31. Debug boards developed by Menlo Micro for the manufactured switches: a - MM1200-EVK; b - MM3100EVK; c - MM5130EVK2

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5. Fig. 32. Dependence of the maximum input power on frequency

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6. Fig. 33. Dependence of the turn-on resistance of the MM3100 product on temperature

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7. Fig. 34. Dependence of the probability of failures Po on the number of switching cycles in hot mode at different values ​​of the input power

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8. Fig. 35. Voltage diagrams: a - on the gate; b - input radio frequency signal

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9. Fig. 36. Structural diagrams of SP4T MEMS switches from Menlo Micro: a - MM5130; b - MM5120, MM5140

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10. Рис. 37. Зависимости развязки (а) и потерь (б) от частоты для разных портов изделия ММ5130 при температуре 25°С

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11. Fig. 38. Dependence of insertion losses in MM5120 and MM5130 products on the number of switching cycles (at an ambient temperature of 20 ° C and an input signal power of 10 dBm)

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12. Fig. 39. Dependences of the power of harmonic components of the signal on the ambient temperature at a frequency of 1 GHz in the MM5130 product: a - the second harmonic; b - the third harmonic

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13. Fig. 40. Dependence of the main parameters of the MM5120 product on the frequency for different channels at a temperature of 25 °C: a - insertion loss; b - return loss; c - decoupling

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14. Fig. 41. Dependence of the main parameters of the MM5120 product on the frequency for different temperatures: a - insertion loss; b - return loss; c - decoupling

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15. Fig. 42. Dependences of the probability of failure Po for the MM5120 product at different temperature values: a - on time; b - on the number of cycles worked

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16. Fig. 43. Structural diagram of the DPDT switch MM5600 from Menlo Micro

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17. Fig. 44. Dependence of the main parameters of the MM5600 product on the frequency for different channels at a temperature of 25 °C: a - insertion loss; b - return loss; c - decoupling

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