Formation of Blackened Aluminium by Vacuum-Thermal Evaporation for IR Emitters
- Authors: Tarasov A.M.1, Novikov D.V.1, Gorelov D.V.1, Genaralov S.S.2, Amelichev V.V.2
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Affiliations:
- National Research University of Electronic Technology (MIET)
- Scientific-Manufacturing Complex “Technological Centre”
- Issue: Vol 17, No 6 (2023)
- Pages: 488-496
- Section: Materials and Coatings
- URL: https://journals.eco-vector.com/1993-7296/article/view/628909
- DOI: https://doi.org/10.22184/1993-7296.FRos.2023.17.6.488.496
- ID: 628909
Cite item
Abstract
The creation of materials, such as black coatings, operating in the near and middle IR ranges, is a task of current scientific interest. Layers of such materials can be used to improve the efficiency of IR emitters. One of the perspective materials that is well consistent with MEMS technology is a black alumina coating. This article presents the fabrication results of a black aluminum oxide layer by vacuum-thermal evaporation method, and the study of its absorption features in the IR region of the spectrum. Experimental samples of black alumina layers showed absorption in the range of 2,2 to 28 um at 84% and showed high temperature stability up to 800 °C.
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About the authors
A. M. Tarasov
National Research University of Electronic Technology (MIET)
Author for correspondence.
Email: journal@electronics.ru
ORCID iD: 0000-0003-3648-8717
engineer Institute
Russian Federation, ZelenogradD. V. Novikov
National Research University of Electronic Technology (MIET)
Email: journal@electronics.ru
ORCID iD: 0000-0002-9518-1208
engineer Institute
Russian Federation, ZelenogradD. V. Gorelov
National Research University of Electronic Technology (MIET)
Email: journal@electronics.ru
ORCID iD: 0000-0002-0887-9406
head of Research Laboratory
Russian Federation, ZelenogradS. S. Genaralov
Scientific-Manufacturing Complex “Technological Centre”
Email: journal@electronics.ru
ORCID iD: 0000-0002-7455-7800
head of Research Laboratory
Russian Federation, ZelenogradV. V. Amelichev
Scientific-Manufacturing Complex “Technological Centre”
Email: journal@electronics.ru
ORCID iD: 0000-0002-4204-2626
Cand.of Sc. (Eng.), head of the Microstem Technology Department Scientific-Manufacturing Complex
Russian Federation, ZelenogradReferences
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