Email this article Measuring System for Inspection of the Germanium Aspherical Lenses Using the UTM-250 Ultra-Precision Machines
- Authors: Zakharevich E.M.1, Lapshin V.V.1, Shavva M.A.1, Poshekhonov R.A.2, Volkov P.V.3
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Affiliations:
- Aspherica Scientific and Production Association LLC
- Bauman Moscow State Technical University
- Technological Electronic Optical Systems LLC
- Issue: Vol 19, No 2 (2025)
- Pages: 116-129
- Section: Technologies & Technology Equipment
- URL: https://journals.eco-vector.com/1993-7296/article/view/680330
- DOI: https://doi.org/10.22184/1993-7296.FRos.2025.19.2.116.129
- ID: 680330
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Abstract
The article describes a homegrown embedded measuring system for the shape inspection of optical parts that can be used in the ultra-precision machines designed for diamond turning. The control system includes the contact and contactless sensors, a low-coherence interferometer, a signal converter and software that allows calculating any shape deviations of the spherical and aspherical surfaces and adjusting the CNC code to eliminate systematic shape deviations. The examples of using a contact sensor to increase the P-V shape accuracy of aspherical germanium lenses with a diameter of 90 mm from 1.4 μm to 100 nm after the systematic shape deviation compensation are provided. The possible application of a contactless sensor included in the measuring system to adjust an ultra-precision machine, as well as to control flat and cylindrical surfaces are described.
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About the authors
Evgeny M. Zakharevich
Aspherica Scientific and Production Association LLC
Author for correspondence.
Email: zaharev@gmail.com
ORCID iD: 0000-0001-6997-3335
Chief Technologist
Russian Federation, MoscowVasily V. Lapshin
Aspherica Scientific and Production Association LLC
Email: lapshin_v@aspherica.ru
ORCID iD: 0000-0002-6971-8534
Senior Engineer-Researcher
Russian Federation, MoscowMaria A. Shavva
Aspherica Scientific and Production Association LLC
Email: shavva_m@aspherica.ru
ORCID iD: 0000-0002-4676-2567
Cand. of Sciences (Tech.), Chief Designer
Russian Federation, MoscowRoman A. Poshekhonov
Bauman Moscow State Technical University
Email: poshekhonov_r@aspherica.ru
ORCID iD: 0000-0003-2188-7854
Cand. of Sciences (Tech.), Associate Professor
Russian Federation, MoscowPyotr V. Volkov
Technological Electronic Optical Systems LLC
Email: p.volkov.79@yandex.ru
ORCID iD: 0000-0003-2479-0716
Cand. of Sciences (Phys. and Math.), Director
Russian Federation, Nizhny NovgorodReferences
- Gao W., Haitjema H., Fang F., Leach R. K., Cheung C. F., Savio E., Linares J. M. On-machine and in-process surface metrology for precision manufacturing. CIRP Annals-Manufacturing Technology. 2019. doi: 10.1016/j.cirp.2019.05.005.
- Automated form error compensation. URL: https://www.precitech.com/precision-optics-technology/application-notes/automated-form-error-correction.
- AIR BEARING C-LVDT USER’S GUIDE. Capacitive LVDT-Type Contact Sensor. URL: https://www.lionprecision.com/user-manual-air-bearing-c-lvdt/ (Дата посещения 01.02.2025).
- Бурдак С. В., Захаревич Е. М., Лапшин В. В., Шавва М. А., Пошехонов Р. А. Инновационные разработки в области российского ультрапрецизионного станкостроения. Фотоника. 2024;18(2):116–120, doi: 10.22184/1993-7296.FRos.2024.18.2.116.120. Burdak S. V., Zakharevich E. M., Lapshin V. V., Shavva M. A., Poshekhonov R. A. Innovative Developments in the Field of Russian Ultra-precision Machine Tools. Photonics Russia. 2024; 18(2): 116–120, doi: 10.22184/1993-7296.FRos.2024.18.2.116.120.
- Лапшин В. В., Захаревич Е. М., Кузнецов М. С., Зараменских К. С., Осипов А. В. Технология обработки оптических деталей из кристаллов КРС-5 методом алмазного точения и фрезерования. Фотоника. 2021;15(1):18–29. Lapshin V. V., Zakharevich E. M., Kuznetsov M. S., Zaramenskikh K. S., Osipov A. V. Technology of Machining Optical Parts Made of KRS5 Crystals by Diamond Turning and Milling. Photonics Russia. 2021;15(1):18–29.
- Захаревич Е. М., Пошехонов Р. А., Лапшин В. В., Шавва М. А. Метрологическое обеспечение ультрапрецизионных станков для обработки оптики и точной механики. Презентация с демо-дня индустр. центра компетенций «Метрология и измерительная техника», Госкорпорации Ростех. М. 2024. URL: https://aspherica.ru/publications. (Дата посещения 10.02.2025). Zaharevich E. M., Poshekhonov R. A., Lapshin V. V., Shavva M. A. Metrologicheskoe obespechenie ul’traprecizionnyh stankov dlya obrabotki optiki i tochnoj mekhaniki. Prezentaciya s demo-dnya industr. centra kompetencij ”Metrologiya i izmeritel’naya tekhnika”, Goskorporacii Rostekh. M. 2024. URL: https://aspherica.ru/publications. (10.02.2025).
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