Stamp electron-beam nanolithography as a tool for fabricating aperiodic diffraction gratings for X-ray optics

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Abstract

The results of fabrication and characterization of metallized aperiodic diffraction gratings (with a line density ranging from 150 to 570 lines per mm) using modernized scanning stamp electron-beam nanolithography machine ZBA-21 with a 200 nm process technological standard and a working area of up to 150 × 150 mm are presented. The characterization was performed using scanning atomic force microscopy.

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About the authors

A. I. Arzhanov

P. N. Lebedev Physical Institute of the Russian Academy of Sciences; Moscow Pedagogical State University (MPGU)

Email: a_v_naumov@mail.ru
ORCID iD: 0000-0001-9305-067X
Russian Federation, Moscow, Troitsk; Moscow

A. S. Shelkovnikov

P. N. Lebedev Physical Institute of the Russian Academy of Sciences

Email: a_v_naumov@mail.ruро
ORCID iD: 0000-0003-3391-2738
Russian Federation, Moscow, Troitsk

V. V. Shulga

P. N. Lebedev Physical Institute of the Russian Academy of Sciences

Email: a_v_naumov@mail.ru
Russian Federation, Moscow, Troitsk

K. E. Aleksashin

P. N. Lebedev Physical Institute of the Russian Academy of Sciences

Email: a_v_naumov@mail.ru
Russian Federation, Moscow, Troitsk

A. O. Kolesnikov

P. N. Lebedev Physical Institute of the Russian Academy of Sciences

Email: a_v_naumov@mail.ru
ORCID iD: 0000-0003-2511-762X
Russian Federation, Moscow, Troitsk

A. N. Shatokhin

P. N. Lebedev Physical Institute of the Russian Academy of Sciences

Email: a_v_naumov@mail.ru
ORCID iD: 0000-0002-6057-3535
Russian Federation, Moscow, Troitsk

E. N. Ragozin

P. N. Lebedev Physical Institute of the Russian Academy of Sciences

Email: a_v_naumov@mail.ru
ORCID iD: 0000-0001-5912-9229
Russian Federation, Moscow, Troitsk

A. V. Naumov

P. N. Lebedev Physical Institute of the Russian Academy of Sciences; Moscow Pedagogical State University (MPGU)

Author for correspondence.
Email: a_v_naumov@mail.ru
ORCID iD: 0000-0001-7938-9802
Russian Federation, Moscow, Troitsk; Moscow

References

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  2. Eremchev I. Y., Prokopova D. V., Losevskii N. N., Mynzhasarov I. T., Kotova S. P., Naumov A. V. Three-dimensional fluorescence nanoscopy of single quantum emitters based on the optics of spiral light beams. Physics-Uspekhi. 2022;65(6):617–626. doi: 10.3367/UFNe.2021.05.038982
  3. Ragozin E. N., Vishnyakov E. A., Kolesnikov A. O., Pirozhkov A. S., Shatokhin A. N. Soft X-ray spectrometers based on aperiodic reflection gratings and their application. Physics-Uspekhi. 2021; 64 495–514. doi: 10.3367/UFNr.2020.06.038799
  4. Kovalets N. P., Kozhina E. P., Razumovskaya I. V., Arzhanov A. I., Naumov А. V. Scratching of metallized polymer films by vickers indenter as a method for controlled production of sers-active metasurfaces. Journal of Luminescence. 2024; 275:120803. doi: 10.1016/j.jlumin.2024.120803
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  6. Kotova S. P., Losevsky N. N., Mayorova A. M., Samagin S. A. Optothermal traps based on sector diffraction optical elements. Bulletin of the Russian Academy of Sciences: Physics. 87 (12), 1767-1772 (2023). doi: 10.1134/s1062873823704038
  7. Kazakov I. A., Malakhov K. M., Kovalev E. E., Mkrtchyan A. A., Mishevsky M. S., Svetikov V. V., Shipulin A. V. Study of operational algorithm for interrogator with arrayed waveguide grating on a photonic integrated circuit. Photonics Russia 18 (2) 122-135 (2024). doi: 10.22184/1993-7296.FRos.2024.18.2.122.135

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2. Fig. 1. Initial characterization of the lithographically fabricated aperiodic grating with a variable spatial period: a) external view of the NTegra atomic force microscope; general view of the sample; b) height profile of the grating lines (example from a region with a density of ≈270 lines/mm), obtained by atomic force microscopy; measured profile depth ≈160 nm; c) fragments of the topography of different regions of the grating with variable spatial period, obtained by AFM (regions 1–4).

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Copyright (c) 2025 Arzhanov A.I., Shelkovnikov A.S., Shulga V.V., Aleksashin K.E., Kolesnikov A.O., Shatokhin A.N., Ragozin E.N., Naumov A.V.