Every atom counts: the use of high-purity gases in the microelectronics industry

S. Dubyaga; Дубяга С.; I. Kozyrev; Козырев И.

doi:10.22184/1992-4178.2024.238.7.190.191

Every atom counts: the use of high-purity gases in the microelectronics industry

Authors: Dubyaga S.¹, Kozyrev I.¹
Affiliations:
1. ООО «Фирма «ХОРСТ»
Issue: No 7 (2024)
Pages: 190-191
Section: Manufacturing equipment and process materials
URL: https://journals.eco-vector.com/1992-4178/article/view/636204
DOI: https://doi.org/10.22184/1992-4178.2024.238.7.190.191
ID: 636204

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Abstract

HORST LLC is the main supplier of high-purity gases for the microelectronics industry of Russia and Belarus, having its own production facilities. The article discusses the features of technologies for the production and deep purification of gases used in the production of semiconductor materials.