High-frequency capacitors manufactured using MEMS Technology

Мұқаба

Дәйексөз келтіру

Толық мәтін

Ашық рұқсат Ашық рұқсат
Рұқсат жабық Рұқсат берілді
Рұқсат жабық Рұқсат ақылы немесе тек жазылушылар үшін

Аннотация

The article provides an overview of the main technologies used to manufacture microelectromechanical systems (MEMS). It examines the design features of MEMS capacitors and their operating principles, and provides examples of devices based on them.

Толық мәтін

Рұқсат жабық

Авторлар туралы

V. Kochemasov

ООО «Радиокомп»

Хат алмасуға жауапты Автор.
Email: vkochemasov@radiocomp.ru

генеральный директор

Ресей

V. Gorbachev

ООО «Радиокомп»

Email: vkochemasov@radiocomp.ru

инженер

Ресей

S. Khorev

ООО «Радиокомп»

Email: vkochemasov@radiocomp.ru

инженер

Ресей

Әдебиет тізімі

  1. Кочемасов В., Хорев С. Продукция компании Ion Beam Milling (краткий обзор) // ЭЛЕКТРОНИКА: Наука, Технология, Бизнес, 2013. №5. С. 102–107.
  2. https://www.rlocman.ru/review/article.html?di=147959.
  3. Веселов А. Г., Рябушкин С. Л., Шуллер И. Я. Увеличение холловской подвижности в тонких пленках InSb, модифицированных низкоэнергетической кислородной плазмой // Письма в ЖТФ, 1992. Т. 18, № 11. С. 63–66.
  4. Шурыгина В. Радиочастотные МЭМС+КМОП // ЭЛЕКТРОНИКА: Наука, Технология, Бизнес, 2014. №3. С. 149–160.
  5. Elshurafa A. M., Radwan A. G., Emira A., Salama K. N. RF MEMS Fractal Capacitors with High Self Resonant Frequencies // Journal of Microelectromechanical Systems, 2012. V. 21. PP. 10–12.
  6. Manoj Vasudeo Sonje. Design and Simulation analysis of MEMS parallel plate capacitor models for voltage conversion and power harvesting // The Faculty of the Graduate School at the University of Missouri, Columbia, 2011.
  7. Loboda V. V., Solomatova U. V. Capacitive MEMS microphones for medical application // Computing, Telecommunication and Control, 2021. V. 14. No. 2. PP. 65–78.
  8. https://radioskot.ru/publ/nachinajushhim/mikrofony_mems/5-1-0-1680?ysclid=lpjj4yggyz396424527.
  9. Козлов В. С., Цаладонов А. Д., Биран С. А., Короткевич Д. А., Короткевич А. В. МЭМС на основе анодного оксида алюминия для применения в высокочастотных схемах // Минск: БГУИР, 2022. С. 290–291.
  10. Suan Hui Pu. A micromachined zipping variable capacitor // Imperial College London, Electrical and Electronic Engineering, 2010. Doctoral Thesis, 159 p.
  11. Shavezipur M. Novel MEMS Tunable Capacitors with Linear Capacitance-Voltage Response Considering Fabrication Uncertainties // Waterloo, Ontario, 2008.
  12. Yoon J.-B., Nguyen C. T.-C. A High-Q Tunable Micromechanical Capacitor With Movable Dielectric for RF Applications // Center for Integrated Microsystems Department of EECS, University of Michigan Ann Arbor, MI 48109.
  13. Luo J. K., Lin M., Fu Y. Q., Wang L., Flewitt A. J., Spearing S. M., Fleck N. A., Milne W. I. MEMS based digital variable capacitors with a high-k dielectric insulator // Sensors and Actuators A: Physical, 2006. V. 132, PP. 139–146.
  14. Nazli Kheirabi. Millimeter-Wave Reconfigurable CMOS-MEMS Integrated Devices // Waterloo, Ontario, Canada, 2017.
  15. Fahimullah Khan and Mohammad I Younis. RF MEMS electrostatically actuated tunable capacitors and their applications: a review // Journal of Micromechanics and Microengineering, 2022. V. 32. 013002.

Қосымша файлдар

Қосымша файлдар
Әрекет
1. JATS XML
Жүктеу
2. Fig. 1. Pressure sensor using MEMS capacitors

Жүктеу (90KB)
Метадеректер
3. Fig. 2. MEMS capacitor-tunable polysilicon resonator

Жүктеу (90KB)
Метадеректер
4. Fig. 3. Fractal capacitors of the 3rd, 4th and 5th orders (a, b, c) and the dependences of their capacitance (d) and quality factor (d) on frequency

Жүктеу (332KB)
Метадеректер
5. Fig. 4. MEMS capacitors with flat plates [4]

Жүктеу (180KB)
Метадеректер
6. Fig. 5. MEMS microphones based on variable capacitors

Жүктеу (158KB)
Метадеректер
7. Fig. 6. Dependence of the change in capacitance (microphone sensitivity) on the membrane material

Жүктеу (107KB)
Метадеректер
8. Fig. 7. Variable MEMS capacitor with a rotating plate: a - structure of the outer movable plate, b - section of the movable plate, c - finished variable capacitor

Жүктеу (130KB)
Метадеректер
9. Fig. 8. Rotary variable capacitor developed at UCLA: a – capacitor layout, b – photograph of the finished capacitor, c – dependence of the capacitor capacitance on the control voltage: the upper line corresponds to plates 25 μm thick and 425 μm long; the lower line corresponds to plates 25 μm thick and 200 μm long

Жүктеу (165KB)
Метадеректер
10. Fig. 9. Variable MEMS capacitor with triangular plates: a – capacitor layout, b – dependence of the capacitor capacitance on the main control voltage

Жүктеу (116KB)
Метадеректер
11. Fig. 10. Changing the capacitance of a capacitor using a dielectric layer

Жүктеу (133KB)
Метадеректер
12. Fig. 11. Characteristics and design options of variable MEMS capacitors

Жүктеу (210KB)
Метадеректер
13. Fig. 12. Switching MEMS capacitor

Жүктеу (121KB)
Метадеректер
14. Fig. 13. Assembly of MEMS switch capacitors

Жүктеу (92KB)
Метадеректер
15. Fig. 14. MEMS fishbone capacitor

Жүктеу (104KB)
Метадеректер
16. Fig. 15. MEMS capacitor of the "fishbone" type of three elements and its characteristics [11]

Жүктеу (113KB)
Метадеректер

© Kochemasov V., Gorbachev V., Khorev S., 2025