High-frequency capacitors manufactured using MEMS Technology

封面

如何引用文章

全文:

开放存取 开放存取
受限制的访问 ##reader.subscriptionAccessGranted##
受限制的访问 订阅或者付费存取

详细

The article provides an overview of the main technologies used to manufacture microelectromechanical systems (MEMS). It examines the design features of MEMS capacitors and their operating principles, and provides examples of devices based on them.

全文:

受限制的访问

作者简介

V. Kochemasov

ООО «Радиокомп»

编辑信件的主要联系方式.
Email: vkochemasov@radiocomp.ru

генеральный директор

俄罗斯联邦

V. Gorbachev

ООО «Радиокомп»

Email: vkochemasov@radiocomp.ru

инженер

俄罗斯联邦

S. Khorev

ООО «Радиокомп»

Email: vkochemasov@radiocomp.ru

инженер

俄罗斯联邦

参考

  1. Кочемасов В., Хорев С. Продукция компании Ion Beam Milling (краткий обзор) // ЭЛЕКТРОНИКА: Наука, Технология, Бизнес, 2013. №5. С. 102–107.
  2. https://www.rlocman.ru/review/article.html?di=147959.
  3. Веселов А. Г., Рябушкин С. Л., Шуллер И. Я. Увеличение холловской подвижности в тонких пленках InSb, модифицированных низкоэнергетической кислородной плазмой // Письма в ЖТФ, 1992. Т. 18, № 11. С. 63–66.
  4. Шурыгина В. Радиочастотные МЭМС+КМОП // ЭЛЕКТРОНИКА: Наука, Технология, Бизнес, 2014. №3. С. 149–160.
  5. Elshurafa A. M., Radwan A. G., Emira A., Salama K. N. RF MEMS Fractal Capacitors with High Self Resonant Frequencies // Journal of Microelectromechanical Systems, 2012. V. 21. PP. 10–12.
  6. Manoj Vasudeo Sonje. Design and Simulation analysis of MEMS parallel plate capacitor models for voltage conversion and power harvesting // The Faculty of the Graduate School at the University of Missouri, Columbia, 2011.
  7. Loboda V. V., Solomatova U. V. Capacitive MEMS microphones for medical application // Computing, Telecommunication and Control, 2021. V. 14. No. 2. PP. 65–78.
  8. https://radioskot.ru/publ/nachinajushhim/mikrofony_mems/5-1-0-1680?ysclid=lpjj4yggyz396424527.
  9. Козлов В. С., Цаладонов А. Д., Биран С. А., Короткевич Д. А., Короткевич А. В. МЭМС на основе анодного оксида алюминия для применения в высокочастотных схемах // Минск: БГУИР, 2022. С. 290–291.
  10. Suan Hui Pu. A micromachined zipping variable capacitor // Imperial College London, Electrical and Electronic Engineering, 2010. Doctoral Thesis, 159 p.
  11. Shavezipur M. Novel MEMS Tunable Capacitors with Linear Capacitance-Voltage Response Considering Fabrication Uncertainties // Waterloo, Ontario, 2008.
  12. Yoon J.-B., Nguyen C. T.-C. A High-Q Tunable Micromechanical Capacitor With Movable Dielectric for RF Applications // Center for Integrated Microsystems Department of EECS, University of Michigan Ann Arbor, MI 48109.
  13. Luo J. K., Lin M., Fu Y. Q., Wang L., Flewitt A. J., Spearing S. M., Fleck N. A., Milne W. I. MEMS based digital variable capacitors with a high-k dielectric insulator // Sensors and Actuators A: Physical, 2006. V. 132, PP. 139–146.
  14. Nazli Kheirabi. Millimeter-Wave Reconfigurable CMOS-MEMS Integrated Devices // Waterloo, Ontario, Canada, 2017.
  15. Fahimullah Khan and Mohammad I Younis. RF MEMS electrostatically actuated tunable capacitors and their applications: a review // Journal of Micromechanics and Microengineering, 2022. V. 32. 013002.

补充文件

附件文件
动作
1. JATS XML
下载
2. Fig. 1. Pressure sensor using MEMS capacitors

下载 (90KB)
索引源数据
3. Fig. 2. MEMS capacitor-tunable polysilicon resonator

下载 (90KB)
索引源数据
4. Fig. 3. Fractal capacitors of the 3rd, 4th and 5th orders (a, b, c) and the dependences of their capacitance (d) and quality factor (d) on frequency

下载 (332KB)
索引源数据
5. Fig. 4. MEMS capacitors with flat plates [4]

下载 (180KB)
索引源数据
6. Fig. 5. MEMS microphones based on variable capacitors

下载 (158KB)
索引源数据
7. Fig. 6. Dependence of the change in capacitance (microphone sensitivity) on the membrane material

下载 (107KB)
索引源数据
8. Fig. 7. Variable MEMS capacitor with a rotating plate: a - structure of the outer movable plate, b - section of the movable plate, c - finished variable capacitor

下载 (130KB)
索引源数据
9. Fig. 8. Rotary variable capacitor developed at UCLA: a – capacitor layout, b – photograph of the finished capacitor, c – dependence of the capacitor capacitance on the control voltage: the upper line corresponds to plates 25 μm thick and 425 μm long; the lower line corresponds to plates 25 μm thick and 200 μm long

下载 (165KB)
索引源数据
10. Fig. 9. Variable MEMS capacitor with triangular plates: a – capacitor layout, b – dependence of the capacitor capacitance on the main control voltage

下载 (116KB)
索引源数据
11. Fig. 10. Changing the capacitance of a capacitor using a dielectric layer

下载 (133KB)
索引源数据
12. Fig. 11. Characteristics and design options of variable MEMS capacitors

下载 (210KB)
索引源数据
13. Fig. 12. Switching MEMS capacitor

下载 (121KB)
索引源数据
14. Fig. 13. Assembly of MEMS switch capacitors

下载 (92KB)
索引源数据
15. Fig. 14. MEMS fishbone capacitor

下载 (104KB)
索引源数据
16. Fig. 15. MEMS capacitor of the "fishbone" type of three elements and its characteristics [11]

下载 (113KB)
索引源数据

版权所有 © Kochemasov V., Gorbachev V., Khorev S., 2025