Author Details
Telegin, S. V.
| Issue | Section | Title | File |
| Vol 19, No 1 (2025) | Materials and Coatings | Preparation and properties study of IGZO thin films obtained by PECVD method |
| Issue | Section | Title | File |
| Vol 19, No 1 (2025) | Materials and Coatings | Preparation and properties study of IGZO thin films obtained by PECVD method |