Author Details
Telegin, S. V.
| Issue | Section | Title | File |
| Vol 19, No 1 (2025) | Materials and Coatings | Preparation and properties study of IGZO thin films obtained by PECVD method |
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Keywords
PECVD
Raman spectroscopy
additive technologies
biophotonics
efficiency
image processing
laser hardening
luminescence
microhardness
optical
passive optoelectronic system
photonic integrated circuits
photosynthetic photon flux density
photosynthetically active radiation
plasma
polymers
solar power plant
spectral characteristic
thin films
vegetation indices
wear resistance
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Keywords
PECVD
Raman spectroscopy
additive technologies
biophotonics
efficiency
image processing
laser hardening
luminescence
microhardness
optical
passive optoelectronic system
photonic integrated circuits
photosynthetic photon flux density
photosynthetically active radiation
plasma
polymers
solar power plant
spectral characteristic
thin films
vegetation indices
wear resistance