电邮这篇文章 INFLUENCE OF MOBILE POSITIVE CHARGE ON ELECTRONIC CONDUCTIVITY OF DIELECTRIC WITH HETEROGENEOUS BLOCKING BORDER
- 作者: Perov GV1, Sedinin VI1
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- 期: 卷 10, 编号 2 (2009)
- 页面: 59-61
- 栏目: Articles
- ##submission.datePublished##: 15.06.2009
- URL: https://journals.eco-vector.com/2712-8970/article/view/504906
- ID: 504906
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The correlation between size of the positive mobile charge and electronic conductivity of oxide on polycrystalline silicon is established by the experimental method of thermally stimulated polarization and depolarization of MIS-structures. The boundary conditions of the problem for the working model of mobile charge behavior in isolating layers which were generated on a rough semiconductor film, are formulated.
参考
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- Groesneken, G. A quantation model for the conductionin oxides thermally grown polycristallyne silicon / G. Groesneken, H. E. Maes // IEEE Trans. on El. Dev . 1986. Vol. ED-33, № 7. P. 1028-1042.
- Сальман, Е. Г. Изучение процессов образования и переноса заряда в слоях двуокиси кремния на кремнии / Е . Г. Сальман, В. Н. Вертопрахов, В. С. Данилович. ЦИОНТПИК Деп.вВИНИТИ: №558-76. Новосибирск, 1975.
- Salman, E. G. Thermally stimulated depolarisation current controlled by surface charge change / E. G. Salman, V . N. V ertoprakhov // Phys. Stat. Sol. 1988. V ol. 1008, № 2. P . 625-630.
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