The influence of mobile positive charge on electronic conductivity of dielectric with heterogeneous blocking border


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Abstract

The correlation between the size of a positive mobile charge and electronic conductivity of oxide on polycrystalline silicon is established with the help of experimental method of thermally stimulated polarization and depolarization of MIS-structures. The boundary conditions of a problem for the working model of behavior of a mobile charge in isolating layers generated on a rough semiconductor film are formulated.

About the authors

G V Perov

Siberian State University of Telecommunications and Computer Science, Russia, Novosibirsk

Siberian State University of Telecommunications and Computer Science, Russia, Novosibirsk

V I Sedinin

Siberian State University of Telecommunications and Computer Science, Russia, Novosibirsk

Siberian State University of Telecommunications and Computer Science, Russia, Novosibirsk

References

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  3. Сальман, Е. Г. Изучение процессов образования и переноса заряда в слоях двуокиси кремния на кремнии / Е. Г. Сальман, В. Н. Вертопрахов, В. С. Данилович. ЦИОНТ ПИК. Деп. в ВИНИТИ: № 558-76. Новосибирск, 1975.
  4. Salman, E. G. Thermally stimulated depolarization current controlled by surface charge change /E.G. Salman, V N. Vertoprakhov // Phys. Stat. Sol. (a). 1988. Vol. 1008. № 2. P. 625-630

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Copyright (c) 2009 Perov G.V., Sedinin V.I.

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