Мақаланы E-mail арқылы жіберу An automatic device for measuring resistivity of the silicon four-point probe method
- Авторлар: Vladimirov VM1, Shepov VN1, Grinin EF2, Sergiy ME3
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Мекемелер:
- Krasnoyarsk Scientific Centre, RussianAcademy of Sciences, Siberian Branch
- LLC NPF Elektron, Russia, Krasnoyarsk
- Special Engineering and Design Office Nauka of the Krasnoyarsk Scientific Centre, RussianAcademy of Sciences,Siberian Branch, Russia, Krasnoyarsk
- Шығарылым: Том 10, № 5 (2009)
- Беттер: 25-27
- Бөлім: Articles
- URL: https://journals.eco-vector.com/2712-8970/article/view/508529
- ID: 508529
Дәйексөз келтіру
Толық мәтін
Аннотация
Негізгі сөздер
Авторлар туралы
V Vladimirov
Krasnoyarsk Scientific Centre, RussianAcademy of Sciences, Siberian BranchKrasnoyarsk Scientific Centre, RussianAcademy of Sciences, Siberian Branch
V Shepov
Krasnoyarsk Scientific Centre, RussianAcademy of Sciences, Siberian BranchKrasnoyarsk Scientific Centre, RussianAcademy of Sciences, Siberian Branch
E Grinin
LLC NPF Elektron, Russia, KrasnoyarskLLC NPF Elektron, Russia, Krasnoyarsk
M Sergiy
Special Engineering and Design Office Nauka of the Krasnoyarsk Scientific Centre, RussianAcademy of Sciences,Siberian Branch, Russia, KrasnoyarskSpecial Engineering and Design Office Nauka of the Krasnoyarsk Scientific Centre, RussianAcademy of Sciences,Siberian Branch, Russia, Krasnoyarsk
Әдебиет тізімі
- SEMIMF-84. Test method for measuring resistivity of silicon wafers with in-line four-point probe [Electronic resource] // SEMI. Electronic data. Cop. 2008. Access mode : http://dom.semi.org/en/index.htm.Title from screen.
- SEMI MF-81. Test method for measuring radial resistivity variation on silicon wafers [Electronic resource] // SEMI. Electronic data. Cop. 2008. Access mode: http://dom.semi.org/en/index.htm.Title from screen.
- SEMIMF-1527. Guide for application of certified reference materials and reference wafers for calibration and control of instruments for measuring resistivity of silicon [Electronic resource] // SEMI. Electronic data. Cop. 2008. Access mode : http://dom.semi.org/en/index.htm.Title from screen.
- ГОСТ 19658-81. Кремний металлически в слитках. Технические условия = Monocrystalline silicon in ingost. Specifications. Введ. 01.01.1983. M.: Изд-во стандартов, 1990.59 с.
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