The influence of mobile positive charge on electronic conductivity of dielectric with heterogeneous blocking border


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The correlation between the size of a positive mobile charge and electronic conductivity of oxide on polycrystalline silicon is established with the help of experimental method of thermally stimulated polarization and depolarization of MIS-structures. The boundary conditions of a problem for the working model of behavior of a mobile charge in isolating layers generated on a rough semiconductor film are formulated.

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G Perov

Siberian State University of Telecommunications and Computer Science, Russia, Novosibirsk

Siberian State University of Telecommunications and Computer Science, Russia, Novosibirsk

V Sedinin

Siberian State University of Telecommunications and Computer Science, Russia, Novosibirsk

Siberian State University of Telecommunications and Computer Science, Russia, Novosibirsk

参考

  1. Han Sheng Lee. High electric field generated electron traps in oxide grown from polycrystalline silicon/Han Sheng Lee //Appl. Phys. Lett. 1980. Vol. 37. № 12. P. 1080-1082.
  2. Groesneken, G. Aquantationmodelforthe conduction in oxides thermally grown polycrystalline silicon / G. Groesneken, H.E.Maes//IEEE Trans. on El. Dev. 1986. Vol. ED-33. №. 7. P. 1028-1042.
  3. Сальман, Е. Г. Изучение процессов образования и переноса заряда в слоях двуокиси кремния на кремнии / Е. Г. Сальман, В. Н. Вертопрахов, В. С. Данилович. ЦИОНТ ПИК. Деп. в ВИНИТИ: № 558-76. Новосибирск, 1975.
  4. Salman, E. G. Thermally stimulated depolarization current controlled by surface charge change /E.G. Salman, V N. Vertoprakhov // Phys. Stat. Sol. (a). 1988. Vol. 1008. № 2. P. 625-630

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