Photon emission is an innovative method for analyzing defects in microelectronics

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Abstract

The analytical complex “Photon”, developed jointly by “Optoelectronic systems” JSC and NTC “Belmicrosystems”, solves the problem of identifying hidden defects of integrated circuits, such as structural defects of the crystal lattice, local current leaks and overheating of power elements.

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About the authors

V. Plebanovich

ОАО «Планар»

Author for correspondence.
Email: vpleba@planar.by

д.т.н.

Belarus, Minsk

V. Svetenkova

ОАО «Оптоэлектронные системы»

Email: marketing@optes.by
Belarus, Minsk

V. Grishkevich

ОАО «Оптоэлектронные системы»

Email: marketing@optes.by
Belarus, Minsk

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2. Fig. 1. Photo of a fragment of the topology of the rejected device No. 1: a – in the photon emission mode; b – optical photo. The glow area of the defective place is circled

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3. Fig. 2. Photo of a fragment of the topology of the rejected device No. 2: a – in the photon emission mode; b – optical photo of the fragment of the topology. The glow area of the defective place is outlined

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Copyright (c) 2025 Plebanovich V., Svetenkova V., Grishkevich V.