Photon emission is an innovative method for analyzing defects in microelectronics

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The analytical complex “Photon”, developed jointly by “Optoelectronic systems” JSC and NTC “Belmicrosystems”, solves the problem of identifying hidden defects of integrated circuits, such as structural defects of the crystal lattice, local current leaks and overheating of power elements.

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作者简介

V. Plebanovich

ОАО «Планар»

编辑信件的主要联系方式.
Email: vpleba@planar.by

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白俄罗斯, Minsk

V. Svetenkova

ОАО «Оптоэлектронные системы»

Email: marketing@optes.by
白俄罗斯, Minsk

V. Grishkevich

ОАО «Оптоэлектронные системы»

Email: marketing@optes.by
白俄罗斯, Minsk

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2. Fig. 1. Photo of a fragment of the topology of the rejected device No. 1: a – in the photon emission mode; b – optical photo. The glow area of the defective place is circled

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3. Fig. 2. Photo of a fragment of the topology of the rejected device No. 2: a – in the photon emission mode; b – optical photo of the fragment of the topology. The glow area of the defective place is outlined

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版权所有 © Plebanovich V., Svetenkova V., Grishkevich V., 2025