电邮这篇文章 Deep ultraviolet microscopy: principles and prospects of application in industry and science
- 作者: Plebanovich V.1, Grishkevich V.2
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隶属关系:
- ОАО «Планар»
- ОАО «Оптоэлектронные системы»
- 期: 编号 7 (2025)
- 页面: 120-124
- 栏目: Reliability and validation
- URL: https://journals.eco-vector.com/1992-4178/article/view/690218
- DOI: https://doi.org/10.22184/1992-4178.2025.249.7.120.124
- ID: 690218
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详细
The article reviews the physical foundations and practice of application of DUV-microscopy. The development of laser technologies and the emergence of new sensors, modern optical materials opens the way to its widespread implementation in microelectronics, biomedicine and materials science.
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作者简介
V. Plebanovich
ОАО «Планар»
编辑信件的主要联系方式.
Email: vpleba@planar.by
к.т.н.
白俄罗斯, г. МинскV. Grishkevich
ОАО «Оптоэлектронные системы»
Email: marketing@optes.by
白俄罗斯, г. Минск
参考
- https://ru.wikipedia.org/wiki/
- Smith A. (2023). DUV Microscopy for Semiconductor Inspection // Nature Photonics.
- ZEISS Academy Microscopy, https://www.zeiss.com/
- Zhang L. (2022). Deep UV Imaging of Biomolecules Without Labeling // Science Advances.
- ОАО «Оптоэлектронные системы», https://www.optes.by/
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Fig. 1. Optical range
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Fig. 2. Airy diffraction patterns created by light from two point sources passing through a circular aperture, such as the pupil of the eye. Points that are far apart (left) or that meet the Rayleigh criterion (center) can be distinguished. Points closer than the Rayleigh criterion (right) are difficult to distinguish
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Fig. 3. Automated microscope MA-300
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Fig. 4. GUF – high-resolution analytical complex operating in the ultraviolet region of the spectrum (λ = 248 nm)
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