Study of Integrated Optical Switch for Development of Logical Element Controlled by the Thermal Influence on Ge2Sb2Te5 Layer (GST)
- Authors: Kadochkin A.S.1, Amelichev V.V.1, Generalov S.S.1, Gorelov D.V.1
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Affiliations:
- Research and Production Complex “Technological Center”
- Issue: Vol 17, No 7 (2023)
- Pages: 556-564
- Section: Quantum Technologies
- URL: https://journals.eco-vector.com/1993-7296/article/view/627985
- DOI: https://doi.org/10.22184/1993-7296.FRos.2023.17.7.556.564
- ID: 627985
Cite item
Abstract
The alternating phase layer Ge2Sb2Te5 (GST) demonstrates a significant refractive index difference between the amorphous (a-GST) and crystalline (c-GST) states. The fast and reversible phase transition between the two states allows for high speed and thermal stability of integrated optical devices. The paper presents a study of an integrated optical switch based on an annular microresonator with a superimposed GST layer controlled by the thermal influence. Such switches may be used in the optical circuits to implement logic functions.
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About the authors
A. S. Kadochkin
Research and Production Complex “Technological Center”
Author for correspondence.
Email: journal@electronics.ru
ORCID iD: 0000-0002-7960-1583
Cand. of Sciences (Phyth.&Math.), senior researcher of the microsystems engineering department of the Federal State Budgetary Scientific Institution
Russian Federation, Zelenograd, MoscowV. V. Amelichev
Research and Production Complex “Technological Center”
Email: journal@electronics.ru
ORCID iD: 0000-0002-4204-2626
Cand. of Sciences (Eng.), head of the microsystems engineering department
Russian Federation, Zelenograd, MoscowS. S. Generalov
Research and Production Complex “Technological Center”
Email: journal@electronics.ru
ORCID iD: 0000-0002-7455-7800
Head of the research laboratory for nano- and micromechanical systems, microsystems engineering department
Russian Federation, Zelenograd, MoscowD. V. Gorelov
Research and Production Complex “Technological Center”
Email: journal@electronics.ru
ORCID iD: 0000-0002-0887-9406
Head of the research laboratory for integrated microcircuits, microsystems engineering department
Russian Federation, Zelenograd, MoscowReferences
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