Email this article The Films with Low Dielectric Permittivity on the Basis of Lyotropic Liquid Crystals
- Authors: Sonin AA1
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Affiliations:
- MSTU MAMI
- Issue: Vol 3, No 1 (2009)
- Pages: 185-192
- Section: Articles
- URL: https://journals.eco-vector.com/2074-0530/article/view/70008
- DOI: https://doi.org/10.17816/2074-0530-70008
- ID: 70008
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Abstract
The possibility of preparation of solid porous films with low dielectric constant for use in nanoelectronics was demonstrated on example of the CTAB/TEOS/NaSal and CTAB/TEOS/TCS-2 novel precursor solutions. The dielectric constant and mechanical modules of these films were measured. The possibility of use of supercritical CO2 for improvement of the film characteristics was shown.
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