The Films with Low Dielectric Permittivity on the Basis of Lyotropic Liquid Crystals



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The possibility of preparation of solid porous films with low dielectric constant for use in nanoelectronics was demonstrated on example of the CTAB/TEOS/NaSal and CTAB/TEOS/TCS-2 novel precursor solutions. The dielectric constant and mechanical modules of these films were measured. The possibility of use of supercritical CO2 for improvement of the film characteristics was shown.

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A Sonin

MSTU MAMI

MSTU MAMI

参考

  1. K. Maex, M.R. Baklanov, D. Shamiryan, F. Iacopi, S.H. Brongersma, Z.S. Yanovitskaya, J. Appl. Phys., 2003, 93, 8793.
  2. C.T. Kresge, M.E. Leonowicz, W.J. Roth, J.C. Vartulli, J.S. Beck, Nature, 1992, 359, 710.
  3. H. Fan, S. Reed, T. Baer, R. Schunk, G.P. Lopez, C.J. Brinker, Microporous and Mesaporous Mater., 2001, 44-45, 625.
  4. C.J. Brinker, J.W. Scherer, Sol-Gel Science, Academic Press, Boston, 1990.
  5. Yu.M. Lvov, Handbook of Surfaces and Interfaces of Materials, v. 3: Nanostructured Materials, Micelles and Colloids, ed. H.S. Nalwa, Academic Press, New York, 2001. ch. 4. p. 1.
  6. U. Olsson, O. Söderman, P. Guéring, J. Phys. Chem., 1986, 90, 5223.
  7. K. Noble, A.B. Seddon, M.L. Turner, P. Chevalier, D.L. Ou, J. Sol-Gel Sci. and Technolol., 2001, 26, 419.
  8. А.А.Сонин, К.-Х. Ли, М.-Г. Ким, Д.-И. Ким, М.-В. Ким, Д.-Б. Сон, М.-Х. Янг, Х.-Д. Шин, Х.-Д. Джон, С.-И. Ким, К.-П. Ю, Жидкие кристаллы и их практическое использование, 2005, в. 3-4, 36.
  9. A.A. Sonin, J.-B. Seon, M.-H. Yang, H.-D. Jeong, Mol. Cryst. Liquid Cryst., 451, 33.
  10. A.A. Sonin, J.-B. Seon, M.-H. Yang, H.-J. Shin, H.-D. Jeong, Mol. Cryst. Liquid Cryst., 2006, 451, 99.
  11. A.A. Sonin, J.-B. Seon, M.-H. Yang, H.-J. Shin, H.-D. Jeong, S.-Y. Kim, K.-P. Yoo, Mol. Cryst. Liquid Cryst., 2006, 460, 75.
  12. А.А.Сонин, Д.-Б. Сон, М.-Х. Янг, Х.-Д. Шин, Х.-Д. Джон, С.-И. Ким, К.-П. Ю, Жидкие кристаллы и их практическое использование, 2007, в. 2, 74.
  13. W.-J. Kim, S.-M. Yang, Langmuir, 2000, 16, 4761.
  14. W.-J. Kim, S.-M. Yang Kim, Adv. Mater, 2001, 13, 1191.
  15. Chen Z.-R., Kornfield J.A., Smith S.D., J.T. Grothaus, M.M. Satkowski, Science, 1997, 277,1248.
  16. S.H. Tolbert, A. Firouzi, G.D. Stucky, B.F. Chmelka, Science, 1997, 278, 264.
  17. A. Firouzi, D.J. Schaefer, S.H. Tolbert, G.D. Stucky, B.F. Chmelka, J. Amer. Chem. Soc., 1997, 119, 9466.
  18. T. Thurn-Albrecht, J. DeRouchey, T.P. Russell, H.M. Jaeger, Macromolecules, 2000, 33, 3250.
  19. T. Thurn-Albrecht, J. Schotter, G.A. Kästle, N. Emley, T. Shibauchi, L. Krusin-Elbaum, K. Gaurini, C.T. Black, M.T. Tuominen, T.P. Russell, Science, 2000, 290, 2126.
  20. A.A. Sonin, M.-G.. Kim, K.-H. Lee, J.-Y. Kim, H.-D. Jeong, M.-W. Kim, Mol. Cryst. Liquid Cryst., 2006, 452, 25.

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