Мақаланы E-mail арқылы жіберу ACTIVE METAMATERIAL BASED ON INTEGRAL NEMS STRUCTURES
- Авторлар: Khartov S1
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Мекемелер:
- Шығарылым: Том 10, № 4 (2009)
- Беттер: 49-53
- Бөлім: Articles
- URL: https://journals.eco-vector.com/2712-8970/article/view/508542
- ID: 508542
Дәйексөз келтіру
Толық мәтін
Аннотация
The conception of the integrated nanoelectromechanical systems (NEMS) formation method is overlooked in this article. This method is based on an original combination of self-organizing and self-aligning processes. The functionality of the proposed NEMS structures and possible applications of nanomaterial, formed by a two-dimensional array of such structures are discussed. The results of the experiments are directed to propose NEMS technology realization.
Әдебиет тізімі
- Pat. WO02080360. Pattern-aligned carbon nanotube growth and tunable resonator apparatus / B. D. Hunt, F . Noca, M. E. Hoenk, et. al. Publ. 2001.
- Pat. EP1646145. Electromechanical filter and electric circuit and electric apparatus employing it / Ya. Naito, Yo. Nakanishi. Publ. 2004.
- Неволин, В. К. Зондовые нанотехнологии в электронике / В. К. Неволин. М. : Техносфера, 2006.
- Разработка подходов к массовому производству структур на основе углеродных нанотрубок / И. И. Бобринецкий, М. М. Симунин, С. В. Хартов и др. // Актуальные проблемы твердотельной микроэлектроники : тр. Х Междунар. науч.-техн. конф. / Таганрог. радиотехн. ун - т. Таганрог, 2006. Ч. 2. С. 6-8.
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