ACTIVE METAMATERIAL BASED ON INTEGRAL NEMS STRUCTURES
- Authors: Khartov S1
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- Issue: Vol 10, No 4 (2009)
- Pages: 49-53
- Section: Articles
- URL: https://journals.eco-vector.com/2712-8970/article/view/508542
- ID: 508542
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Abstract
The conception of the integrated nanoelectromechanical systems (NEMS) formation method is overlooked in this article. This method is based on an original combination of self-organizing and self-aligning processes. The functionality of the proposed NEMS structures and possible applications of nanomaterial, formed by a two-dimensional array of such structures are discussed. The results of the experiments are directed to propose NEMS technology realization.
References
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