电邮这篇文章 ACTIVE METAMATERIAL BASED ON INTEGRAL NEMS STRUCTURES
- 作者: Khartov S1
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- 期: 卷 10, 编号 4 (2009)
- 页面: 49-53
- 栏目: Articles
- URL: https://journals.eco-vector.com/2712-8970/article/view/508542
- ID: 508542
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The conception of the integrated nanoelectromechanical systems (NEMS) formation method is overlooked in this article. This method is based on an original combination of self-organizing and self-aligning processes. The functionality of the proposed NEMS structures and possible applications of nanomaterial, formed by a two-dimensional array of such structures are discussed. The results of the experiments are directed to propose NEMS technology realization.
参考
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- Pat. EP1646145. Electromechanical filter and electric circuit and electric apparatus employing it / Ya. Naito, Yo. Nakanishi. Publ. 2004.
- Неволин, В. К. Зондовые нанотехнологии в электронике / В. К. Неволин. М. : Техносфера, 2006.
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