Enviar artigo por via de e-mail ACTIVE METAMATERIAL BASED ON INTEGRAL NEMS STRUCTURES
- Autores: Khartov S1
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Afiliações:
- Edição: Volume 10, Nº 4 (2009)
- Páginas: 49-53
- Seção: Articles
- URL: https://journals.eco-vector.com/2712-8970/article/view/508542
- ID: 508542
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Resumo
The conception of the integrated nanoelectromechanical systems (NEMS) formation method is overlooked in this article. This method is based on an original combination of self-organizing and self-aligning processes. The functionality of the proposed NEMS structures and possible applications of nanomaterial, formed by a two-dimensional array of such structures are discussed. The results of the experiments are directed to propose NEMS technology realization.
Bibliografia
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- Неволин, В. К. Зондовые нанотехнологии в электронике / В. К. Неволин. М. : Техносфера, 2006.
- Разработка подходов к массовому производству структур на основе углеродных нанотрубок / И. И. Бобринецкий, М. М. Симунин, С. В. Хартов и др. // Актуальные проблемы твердотельной микроэлектроники : тр. Х Междунар. науч.-техн. конф. / Таганрог. радиотехн. ун - т. Таганрог, 2006. Ч. 2. С. 6-8.
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